中国物理B ›› 2015, Vol. 24 ›› Issue (6): 67803-067803.doi: 10.1088/1674-1056/24/6/067803

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition

孙鹏a b, 胡明a, 张锋b, 季一勤b, 刘华松b, 刘丹丹b, 冷健b   

  1. a School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;
    b Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics, HIWING Technology Academy of CASIC, Tianjin 300192, China
  • 收稿日期:2015-01-04 修回日期:2015-01-26 出版日期:2015-06-05 发布日期:2015-06-05
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 61235011) and the Science Foundation of the Science and Technology Commission of Tianjin Municipality, China (Grant Nos. 13JCYBJC17300 and 12JCQNIC01200).

Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition

Sun Peng (孙鹏)a b, Hu Ming (胡明)a, Zhang Feng (张锋)b, Ji Yi-Qin (季一勤)b, Liu Hua-Song (刘华松)b, Liu Dan-Dan (刘丹丹)b, Leng Jian (冷健)b   

  1. a School of Electronic Information Engineering, Tianjin University, Tianjin 300072, China;
    b Tianjin Key Laboratory of Optical Thin Film, Tianjin Jinhang Institute of Technical Physics, HIWING Technology Academy of CASIC, Tianjin 300192, China
  • Received:2015-01-04 Revised:2015-01-26 Online:2015-06-05 Published:2015-06-05
  • Contact: Hu Ming E-mail:huming@tju.edu.cn
  • About author:78.66.-w; 78.30.-j; 78.20.Ci
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61235011) and the Science Foundation of the Science and Technology Commission of Tianjin Municipality, China (Grant Nos. 13JCYBJC17300 and 12JCQNIC01200).

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摘要： Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy (AFM), Raman spectroscopy, nanoindentation, and Fourier transform infrared (FTIR) spectroscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp2 and sp3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases.

关键词: DLC thin film, ion-beam sputtering deposition, chemical bondings, infrared optical and mechanical properties

Abstract: Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy (AFM), Raman spectroscopy, nanoindentation, and Fourier transform infrared (FTIR) spectroscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp2 and sp3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases.

Key words: DLC thin film, ion-beam sputtering deposition, chemical bondings, infrared optical and mechanical properties

中图分类号:  (Optical properties of specific thin films)

  • 78.66.-w
78.30.-j (Infrared and Raman spectra) 78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))