Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition
孙鹏, 胡明, 张锋, 季一勤, 刘华松, 刘丹丹, 冷健
Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition
Sun Peng (孙鹏), Hu Ming (胡明), Zhang Feng (张锋), Ji Yi-Qin (季一勤), Liu Hua-Song (刘华松), Liu Dan-Dan (刘丹丹), Leng Jian (冷健)
中国物理B
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2015, (6): 67803
-067803
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DOI: 10.1088/1674-1056/24/6/067803