中国物理B ›› 2012, Vol. 21 ›› Issue (9): 97802-097802.doi: 10.1088/1674-1056/21/9/097802

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Photoluminescence of silicone oil treated by fluorocarbon plasma

陈天a, 叶超a, 袁颖a, 邓艳红a, 葛水兵a, 徐轶君a, 宁兆元a, 潘小平b, 王振明b   

  1. a School of Physics Science and Technology, Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China;
    b Joint Research Laboratory of Jiemei Biomedical Engineering Instrument, Soochow University, Suzhou 215006, China
  • 收稿日期:2011-12-01 修回日期:2012-02-23 出版日期:2012-08-01 发布日期:2012-08-01
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10975105 and 11075114).

Photoluminescence of silicone oil treated by fluorocarbon plasma

Chen Tian (陈天)a, Ye Chao (叶超)a, Yuan Ying (袁颖)a, Deng Yan-Hong (邓艳红)a, Ge Shui-Bin (葛水兵)a, Xu Yi-Jun (徐轶君)a, Ning Zhao-Yuan (宁兆元)a, Pan Xiao-Pin (潘小平)b, Wang Zhen-Ming (王振明)b   

  1. a School of Physics Science and Technology, Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006, China;
    b Joint Research Laboratory of Jiemei Biomedical Engineering Instrument, Soochow University, Suzhou 215006, China
  • Received:2011-12-01 Revised:2012-02-23 Online:2012-08-01 Published:2012-08-01
  • Contact: Ye Chao E-mail:cye@suda.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 10975105 and 11075114).

摘要: We investigated the photoluminescence characteristics of the silicone oils treated by C2F6 and CHF3 plasma. The silicone oil treated by the C2F6 plasma emitted a white light mainly composed of 415 nm, 469 nm, and 554 nm emissions, while that treated by the CHF3 plasma emitted a pink light (415 nm). Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the photoluminescence correlated with the Si-C bond, the carbon-related defects, and the oxygen vacancies. It was suggested that the light emitting at 554 nm was related to the Si-C bond and the carbon-related defects, while the pink emission at 415 nm was related to the oxygen vacancies.

关键词: photoluminescence, fluorocarbon plasma, silicone oil

Abstract: We investigated the photoluminescence characteristics of the silicone oils treated by C2F6 and CHF3 plasma. The silicone oil treated by the C2F6 plasma emitted a white light mainly composed of 415 nm, 469 nm, and 554 nm emissions, while that treated by the CHF3 plasma emitted a pink light (415 nm). Fourier transformed infrared spectroscopy and Raman spectroscopy studies showed that the photoluminescence correlated with the Si-C bond, the carbon-related defects, and the oxygen vacancies. It was suggested that the light emitting at 554 nm was related to the Si-C bond and the carbon-related defects, while the pink emission at 415 nm was related to the oxygen vacancies.

Key words: photoluminescence, fluorocarbon plasma, silicone oil

中图分类号:  (Photoluminescence, properties and materials)

  • 78.55.-m
78.66.Qn (Polymers; organic compounds) 52.77.-j (Plasma applications)