中国物理B ›› 2012, Vol. 21 ›› Issue (6): 67701-067701.doi: 10.1088/1674-1056/21/6/067701
• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇 下一篇
梁伟正a, 吉彦达a, 南天翔a, 黄江a, 曾慧中a, 杜辉a, 陈充林b c, 林媛a
Liang Wei-Zheng(梁伟正)a), Ji Yan-Da(吉彦达) a), Nan Tian-Xiang(南天翔)a), Huang Jiang(黄江)a), Zeng Hui-Zhong(曾慧中)a), Du Hui(杜辉)a), Chen Chong-Lin(陈充林)b)c), and Lin Yuan(林媛)a)†
摘要: Barium titanate (BTO) thin films were deposited on polycrystalline Ni foils by using the polymer assisted deposition (PAD) technique. The growth conditions including ambient and annealing temperatures were carefully optimized based on thermal dynamic analysis to control the oxidation processing and interdiffusion. Crystal structures, surface morphologies, and dielectric performance were examined and compared for BTO thin films annealed under different temperatures. Correlations between the fabrication conditions, microstructures, and dielectric properties were discussed. BTO thin films fabricated under the optimized conditions show good crystalline structure and promising dielectric properties with εr ~ 400 and tanδ <0.025 at 100 kHz. The data demonstrate that BTO films grown on polycrystalline Ni substrates by PAD are promising in device applications.
中图分类号: (Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials)