中国物理B ›› 2011, Vol. 20 ›› Issue (5): 57801-057801.doi: 10.1088/1674-1056/20/5/057801
张金风, 许晟瑞, 张进成, 郝跃
Zhang Jin-Feng (张金风), Xu Sheng-Rui (许晟瑞), Zhang Jin-Cheng (张进成), Hao Yue (郝跃)
摘要: Nonpolar a-plane GaN epilayers are grown on several r-plane sapphire substrates by metal organic chemical vapour deposition using different nucleation layers: (A) a GaN nucleation layer deposited at low temperature (LT); (B) an AlN nucleation layer deposited at high temperature; or (C) an LT thin AlN nucleation layer with an AlN layer and an AlN/AlGaN superlattice both subsequently deposited at high temperature. The samples have been characterized by X-ray diffraction (XRD), atomic force microscopy and photoluminescence. The GaN layers grown using nucleation layers B and C show narrower XRD rocking curves than that using nucleation layer A, indicating a reduction in crystal defect density. Furthermore, the GaN layer grown using nucleation layer C exhibits a surface morphology with triangular defect pits eliminated completely. The improved optical property, corresponding to the enhanced crystal quality, is also confirmed by temperature-dependent and excitation power-dependent photoluminescence measurements.
中图分类号: (III-V semiconductors)