中国物理B ›› 2010, Vol. 19 ›› Issue (1): 18102-018102.doi: 10.1088/1674-1056/19/1/018102
袁慧敏1, 张锡健2, 王卿璞2, 王统2, 马洪磊2
Zhang Xi-Jian(张锡健)a), Yuan Hui-Min(袁慧敏)b), Wang Qing-Pu(王卿璞)a)† , Wang Tong(王统)a), and Ma Hong-Lei(马洪磊) a)
摘要: Mg_xZn_1 - xO (x \le 0.3) thin films have been prepared on silicon substrates by radio frequency magnetron sputtering at room temperature. The thin films have hexagonal wurtzite single-phase structure and a preferred orientation with the c-axis perpendicular to the substrates. The Mg content in the films is slightly larger than that in the targets. The refractive indices of Mg_xZn_1 - xO films measured at room temperature by spectroscopic ellipsometry (SE) on the wavelength 632.8~nm are systematically decreased with the increasing of Mg content. Optical band gaps of Mg_xZn_1 - xO films are determined by the transmittance spectra. With increasing Mg content, the absorption edges of Mg_xZn_1 - xO films shift to higher energies and band gaps linearly increase from 3.24~eV at x=0 to 3.90~eV at x =0.30.
中图分类号: (Nucleation and growth)