中国物理B ›› 1995, Vol. 4 ›› Issue (10): 783-789.doi: 10.1088/1004-423X/4/10/008

• • 上一篇    

INFLUENCE OF C+-IMPLANTATION DOSE ON BLUE EMISSION AND MICROSTRUCTURES OF Si-BASED POROUS β-SIC

廖良生, 鲍希茂, 李宁生, 杨志峰, 闵乃本   

  1. Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China
  • 收稿日期:1995-01-24 出版日期:1995-10-20 发布日期:1995-10-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China, and in part by the Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica.

INFLUENCE OF C+-IMPLANTATION DOSE ON BLUE EMISSION AND MICROSTRUCTURES OF Si-BASED POROUS $\beta$-SIC

LIAO LIANG-SHENG (廖良生), BAO XI-MAO (鲍希茂), LI NING-SHENG (李宁生), YANG ZHI-FENG (杨志峰), MIN NAI-BEN (闵乃本)   

  1. Department of Physics and State Key Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093 , China
  • Received:1995-01-24 Online:1995-10-20 Published:1995-10-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China, and in part by the Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica.

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摘要： Crystal Si were implanted with different doses of C+ from 1011 to 1017 cm-2 at an energy of 50 keV. β-SiC precipitates were formed by thermal annealing at 1050 ℃ for 1 h and porous structures were prepared by electrochemical anodization. Under the excitation of ultraviolet, the samples, with C+ dose ≥1015 cm-2 have intense blue emission which is stronger than the photoluminescence (PL) intensity of reference porous silicon (PS), and increases as C+ dose increases; the samples with C+ dose ≤1014 cm-2 show similar PL spectra to those of PS. The blue peak intensity in PL spectra is correlated with the TO phonon absorption strength of β-SiC in infrared absorption spectra. The transmission electron microscopy study shows that the blue peak is also correlated with the microstructures. Because porous β-SiC is nanometer in size, it is suggested that the quantum confinement effect be responsible for the blue light emission.

Abstract: Crystal Si were implanted with different doses of C+ from 1011 to 1017 cm-2 at an energy of 50 keV. $\beta$-SiC precipitates were formed by thermal annealing at 1050 ℃ for 1 h and porous structures were prepared by electrochemical anodization. Under the excitation of ultraviolet, the samples, with C+ dose ≥1015 cm-2 have intense blue emission which is stronger than the photoluminescence (PL) intensity of reference porous silicon (PS), and increases as C+ dose increases; the samples with C+ dose ≤1014 cm-2 show similar PL spectra to those of PS. The blue peak intensity in PL spectra is correlated with the TO phonon absorption strength of $\beta$-SiC in infrared absorption spectra. The transmission electron microscopy study shows that the blue peak is also correlated with the microstructures. Because porous $\beta$-SiC is nanometer in size, it is suggested that the quantum confinement effect be responsible for the blue light emission.

中图分类号:  (Porous materials)

  • 78.55.Mb
81.40.Gh (Other heat and thermomechanical treatments) 61.43.Gt (Powders, porous materials) 82.45.Cc (Anodic films)