中国物理B ›› 1994, Vol. 3 ›› Issue (6): 431-438.doi: 10.1088/1004-423X/3/6/005

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

SIMULATION OF X-RAY DIFFRACTION OF MULTILAYER FILM WITH INTERFACIAL ROUGHNESS

高琛, 刘文汉, 吴自勤   

  1. Fundamental Physics Center, University of Science and Technology of China, Hefei 230026, China; Structure Research Labouratory, University of Science and Technology of China, Hefei 230026, China
  • 收稿日期:1993-04-27 出版日期:1994-06-20 发布日期:1994-06-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China and the Foundation for Young Scientiest of USTC.

SIMULATION OF X-RAY DIFFRACTION OF MULTILAYER FILM WITH INTERFACIAL ROUGHNESS

GAO CHEN (高琛), LIU WEN-HAN (刘文汉), WU ZI-QIN (吴自勤)   

  1. Fundamental Physics Center, University of Science and Technology of China, Hefei 230026, China; Structure Research Labouratory, University of Science and Technology of China, Hefei 230026, China
  • Received:1993-04-27 Online:1994-06-20 Published:1994-06-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China and the Foundation for Young Scientiest of USTC.

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摘要： In this paper, the X-ray diffraction profiles of multilayer with uncorrelated rough interfaces are directly simulated using kinematic theory of X-ray diffraction. The result shows that the decrease of the reflective intensity caused by the interracial roughness is more severe than that caused by random fluctuation of period of the same degree, and the decrease of the reflective intensity of high order Bragg deffraction is more rapid than that of low order ones. So it is very important to reduce the interracial roughness in the deposition and in the annealing of multilayer films.

Abstract: In this paper, the X-ray diffraction profiles of multilayer with uncorrelated rough interfaces are directly simulated using kinematic theory of X-ray diffraction. The result shows that the decrease of the reflective intensity caused by the interracial roughness is more severe than that caused by random fluctuation of period of the same degree, and the decrease of the reflective intensity of high order Bragg deffraction is more rapid than that of low order ones. So it is very important to reduce the interracial roughness in the deposition and in the annealing of multilayer films.

中图分类号:  (Multilayers)

  • 68.65.Ac
68.55.-a (Thin film structure and morphology) 61.05.cp (X-ray diffraction) 68.35.Ct (Interface structure and roughness)