Quasi-delta negative ions density of Ar/O2 inductively coupled plasma at very low electronegativity

doi:10.1088/1674-1056/abd16a

中国物理B ›› 2021, Vol. 30 ›› Issue (5): 55201-055201.doi: 10.1088/1674-1056/abd16a

Quasi-delta negative ions density of Ar/O₂ inductively coupled plasma at very low electronegativity

Shu-Xia Zhao(赵书霞)^†

Key Laboratory of Material Modification by Laser, Ion, and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China

收稿日期:2020-10-26 修回日期:2020-12-02 接受日期:2020-12-08 出版日期:2021-05-14 发布日期:2021-05-14
通讯作者: Shu-Xia Zhao E-mail:zhaonie@dlut.edu.cn

Quasi-delta negative ions density of Ar/O₂ inductively coupled plasma at very low electronegativity

Shu-Xia Zhao(赵书霞)^†

Key Laboratory of Material Modification by Laser, Ion, and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China

Received:2020-10-26 Revised:2020-12-02 Accepted:2020-12-08 Online:2021-05-14 Published:2021-05-14
Contact: Shu-Xia Zhao E-mail:zhaonie@dlut.edu.cn

摘要/Abstract

摘要： One of the novel phenomena of Ar/O₂ inductively coupled plasma, the delta negative ions density profile is discovered by the fluid simulation at very low electronegativity. The anions delta is found to be formed by the collaboration of successive plasma transport phases. The plasma transport itself is affected by the delta, exhibiting many new phenomena. A new type of Helmholtz equation is devised to mathematically explain the delta forming mechanism. For revealing the physics behind, a revised spring oscillator dynamic equation has been constructed according to the Helmholtz equation, in a relevant paper [Zhao S X and Li J Z (2021) Chin. Phys. B 30 055202]. The investigation about the anions delta distribution is a nice prediction of new phenomenon in low temperature electronegative plasmas, waiting for the validation of related experiments.

关键词: inductively coupled plasma, Ar/O₂ discharge, very low electronegativity, delta distribution of anions

Abstract: One of the novel phenomena of Ar/O₂ inductively coupled plasma, the delta negative ions density profile is discovered by the fluid simulation at very low electronegativity. The anions delta is found to be formed by the collaboration of successive plasma transport phases. The plasma transport itself is affected by the delta, exhibiting many new phenomena. A new type of Helmholtz equation is devised to mathematically explain the delta forming mechanism. For revealing the physics behind, a revised spring oscillator dynamic equation has been constructed according to the Helmholtz equation, in a relevant paper [Zhao S X and Li J Z (2021) Chin. Phys. B 30 055202]. The investigation about the anions delta distribution is a nice prediction of new phenomenon in low temperature electronegative plasmas, waiting for the validation of related experiments.

Key words: inductively coupled plasma, Ar/O₂ discharge, very low electronegativity, delta distribution of anions

中图分类号: (Elementary processes in plasmas)

52.20.-j

52.25.Fi (Transport properties) 52.65.-y (Plasma simulation)

Shu-Xia Zhao(赵书霞). Quasi-delta negative ions density of Ar/O₂ inductively coupled plasma at very low electronegativity[J]. 中国物理B, 2021, 30(5): 55201-055201.

Shu-Xia Zhao(赵书霞). Quasi-delta negative ions density of Ar/O₂ inductively coupled plasma at very low electronegativity[J]. Chin. Phys. B, 2021, 30(5): 55201-055201.

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Quasi-delta negative ions density of Ar/O₂ inductively coupled plasma at very low electronegativity

Quasi-delta negative ions density of Ar/O₂ inductively coupled plasma at very low electronegativity

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