中国物理B ›› 2012, Vol. 21 ›› Issue (7): 75203-075203.doi: 10.1088/1674-1056/21/7/075203

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition

高飞a, 李雪春a, 赵书霞b, 王友年a   

  1. a School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
    b Research Group PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Antwerp, Belgium
  • 收稿日期:2011-09-27 修回日期:2011-11-04 出版日期:2012-06-01 发布日期:2012-06-01
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11075029 and 11175034), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20090041110026), and the Fundamental Research Funds for Central Universities of China(Grant No. DUT11ZD109).

Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition

Gao Fei(高飞)a), Li Xue-Chun(李雪春)a), Zhao Shu-Xia(赵书霞)b), and Wang You-Nian(王友年)a)†   

  1. a School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China;
    b Research Group PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, B-2610 Antwerp, Belgium
  • Received:2011-09-27 Revised:2011-11-04 Online:2012-06-01 Published:2012-06-01
  • Contact: Wang You-Nian E-mail:ynwang@dlut.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11075029 and 11175034), the Specialized Research Fund for the Doctoral Program of Higher Education of China (Grant No. 20090041110026), and the Fundamental Research Funds for Central Universities of China(Grant No. DUT11ZD109).

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摘要： A Langmuir probe and an ICCD are employed to study the discharge mode transition in an Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.

关键词: mode transition, inductively coupled plasma, Langmuir probe, ICCD

Abstract: A Langmuir probe and an ICCD are employed to study the discharge mode transition in an Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.

Key words: mode transition, inductively coupled plasma, Langmuir probe, ICCD

中图分类号:  (Plasma diagnostic techniques and instrumentation)

  • 52.70.-m
52.80.Pi (High-frequency and RF discharges) 52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons)