中国物理B ›› 2018, Vol. 27 ›› Issue (6): 67403-067403.doi: 10.1088/1674-1056/27/6/067403

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Superconductivity of bilayer titanium/indium thin film grown on SiO2/Si (001)

Zhao-Hong Mo(莫钊洪), Chao Lu(路超), Yi Liu(刘毅), Wei Feng(冯卫), Yun Zhang(张云), Wen Zhang(张文), Shi-Yong Tan(谭世勇), Hong-Jun Zhang(张宏俊), Chun-Yu Guo(郭春煜), Xiao-Dong Wang(汪小冬), Liang Wang(王亮), Rui-Zhu Yang(杨蕊竹), Zhong-Guo Ren(任忠国), Xie-Gang Zhu(朱燮刚), Zhong-Hua Xiong(熊忠华), Qi An(安琪), Xin-Chun Lai(赖新春)   

  1. 1 Institute of Materials, China Academy of Engineering Physics, Jiangyou 621908, China;
    2 Department of Engineering and Applied Physics, School of Physical Sciences, University of Science and Technology of China, Hefei 230026, China;
    3 Zhejiang University, Hangzhou 310058, China;
    4 China Academy of Engineering Physics, Mianyang 621000, China
  • 收稿日期:2017-02-07 修回日期:2018-03-20 出版日期:2018-06-05 发布日期:2018-06-05
  • 通讯作者: Xie-Gang Zhu, Xin-Chun Lai E-mail:zhuxg02@gmail.com;laixinchun@caep.cn

Superconductivity of bilayer titanium/indium thin film grown on SiO2/Si (001)

Zhao-Hong Mo(莫钊洪)1,2, Chao Lu(路超)1, Yi Liu(刘毅)1, Wei Feng(冯卫)1, Yun Zhang(张云)1, Wen Zhang(张文)1, Shi-Yong Tan(谭世勇)1, Hong-Jun Zhang(张宏俊)1, Chun-Yu Guo(郭春煜)3, Xiao-Dong Wang(汪小冬)1, Liang Wang(王亮)1, Rui-Zhu Yang(杨蕊竹)1, Zhong-Guo Ren(任忠国)1, Xie-Gang Zhu(朱燮刚)1, Zhong-Hua Xiong(熊忠华)1, Qi An(安琪)2, Xin-Chun Lai(赖新春)4   

  1. 1 Institute of Materials, China Academy of Engineering Physics, Jiangyou 621908, China;
    2 Department of Engineering and Applied Physics, School of Physical Sciences, University of Science and Technology of China, Hefei 230026, China;
    3 Zhejiang University, Hangzhou 310058, China;
    4 China Academy of Engineering Physics, Mianyang 621000, China
  • Received:2017-02-07 Revised:2018-03-20 Online:2018-06-05 Published:2018-06-05
  • Contact: Xie-Gang Zhu, Xin-Chun Lai E-mail:zhuxg02@gmail.com;laixinchun@caep.cn

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摘要： Bilayer superconducting films with tunable transition temperature (Tc) are a critical ingredient to the fabrication of high-performance transition edge sensors. Commonly chosen materials include Mo/Au, Mo/Cu, Ti/Au, and Ti/Al systems. Here in this work, titanium/indium (Ti/In) bilayer superconducting films are successfully fabricated on SiO2/Si (001) substrates by molecular beam epitaxy (MBE). The success in the epitaxial growth of indium on titanium is achieved by lowering the substrate temperature to -150℃ during indium evaporation. We measure the critical temperature under a bias current of 10 μA, and obtain different superconducting transition temperatures ranging from 645 mK to 2.7 K by adjusting the thickness ratio of Ti/In. Our results demonstrate that the transition temperature decreases as the thickness ratio of Ti/In increases.

关键词: titanium/indium thin film, molecular beam epitaxy (MBE), proximity effect

Abstract: Bilayer superconducting films with tunable transition temperature (Tc) are a critical ingredient to the fabrication of high-performance transition edge sensors. Commonly chosen materials include Mo/Au, Mo/Cu, Ti/Au, and Ti/Al systems. Here in this work, titanium/indium (Ti/In) bilayer superconducting films are successfully fabricated on SiO2/Si (001) substrates by molecular beam epitaxy (MBE). The success in the epitaxial growth of indium on titanium is achieved by lowering the substrate temperature to -150℃ during indium evaporation. We measure the critical temperature under a bias current of 10 μA, and obtain different superconducting transition temperatures ranging from 645 mK to 2.7 K by adjusting the thickness ratio of Ti/In. Our results demonstrate that the transition temperature decreases as the thickness ratio of Ti/In increases.

Key words: titanium/indium thin film, molecular beam epitaxy (MBE), proximity effect

中图分类号:  (Superconducting films and low-dimensional structures)

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