中国物理B ›› 2017, Vol. 26 ›› Issue (5): 58402-058402.doi: 10.1088/1674-1056/26/5/058402
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High quality factor superconducting coplanar waveguide fabricated with TiN
Qiang Liu(刘强), Guang-Ming Xue(薛光明), Xin-Sheng Tan(谭新生), Hai-Feng Yu(于海峰), Yang Yu(于扬)
- 1 National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
2 Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China;
3 Synergetic Innovation Center of Quantum Information & Quantum Physics, University of Science and Technology of China, Hefei 230026, China
High quality factor superconducting coplanar waveguide fabricated with TiN
Qiang Liu(刘强)1, Guang-Ming Xue(薛光明)2, Xin-Sheng Tan(谭新生)1, Hai-Feng Yu(于海峰)1,3, Yang Yu(于扬)1,3
- 1 National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093, China;
2 Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei 230026, China;
3 Synergetic Innovation Center of Quantum Information & Quantum Physics, University of Science and Technology of China, Hefei 230026, China
摘要：
We fabricated TiN coplanar waveguides using standard lithography techniques followed by ICP etch. In order to achieve high quality factor, we investigated the film growth by choosing different deposition conditions for various substrates. Quality factors of waveguide resonators were measured at 20 mK in both high and low microwave power limits. An inner quality factor of several million was achieved at high power limit for a predominantly (200)-oriented TiN film which was grown on HF cleaned silicon wafer. A quality factor of larger than one million was achieved at high power limit for TiN film grown on sapphire.
中图分类号: (Waveguides, transmission lines, striplines)
- 84.40.Az