中国物理B ›› 2017, Vol. 26 ›› Issue (5): 54211-054211.doi: 10.1088/1674-1056/26/5/054211

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Silica-based microcavity fabricated by wet etching

H Long(龙浩), W Yang(杨文), L Y Ying(应磊莹), B P Zhang(张保平)   

  1. Department of Electronic Engineering, Optoelectronics Engineering Research Center, Xiamen University, Xiamen 361005, China
  • 收稿日期:2016-12-23 修回日期:2017-01-21 出版日期:2017-05-05 发布日期:2017-05-05
  • 通讯作者: B P Zhang E-mail:bzhang@xmu.edu.cn
  • 基金资助:

    Project supported by the Postdoctoral Science Foundation of China (Grant No. 2015M582041) and the Special Project on the Integration of Industry, Education and Research of Aviation Industry Corporation of China.

Silica-based microcavity fabricated by wet etching

H Long(龙浩), W Yang(杨文), L Y Ying(应磊莹), B P Zhang(张保平)   

  1. Department of Electronic Engineering, Optoelectronics Engineering Research Center, Xiamen University, Xiamen 361005, China
  • Received:2016-12-23 Revised:2017-01-21 Online:2017-05-05 Published:2017-05-05
  • Contact: B P Zhang E-mail:bzhang@xmu.edu.cn
  • Supported by:

    Project supported by the Postdoctoral Science Foundation of China (Grant No. 2015M582041) and the Special Project on the Integration of Industry, Education and Research of Aviation Industry Corporation of China.

RichHTML

0

PDF (PC)

289

赞

摘要：

Silica whispering gallery mode (WGM) microcavities were fabricated by the buffered oxide etcher and potassium hydroxide wet etching technique without any subsequent chemical or laser treatments. The silicon pedestal underneath was an octagonal pyramid, thus providing a pointed connection area with the top silica microdisk while weakly influencing the resonance modes. The sidewalls of our microdisks were wedge shaped, which was believed to be an advantage for the mode confinement. Efficient coupling from and to the 60 μm diameter microdisk structure was achieved using tapered optical fibres, exhibiting a quality factor of 1.5×104 near a wavelength of 1550 nm. Many resonance modes were observed, and double transverse electric modes were identified by theoretical calculations. The quality factor of the microdisks was also analysed to deduce the cavity roughness. The wet etching technique provides a more convenient avenue to fabricate WGM microdisks than conventional fabrication methods.

关键词: whispering gallery mode, wet etching, quality factor

Abstract:

Silica whispering gallery mode (WGM) microcavities were fabricated by the buffered oxide etcher and potassium hydroxide wet etching technique without any subsequent chemical or laser treatments. The silicon pedestal underneath was an octagonal pyramid, thus providing a pointed connection area with the top silica microdisk while weakly influencing the resonance modes. The sidewalls of our microdisks were wedge shaped, which was believed to be an advantage for the mode confinement. Efficient coupling from and to the 60 μm diameter microdisk structure was achieved using tapered optical fibres, exhibiting a quality factor of 1.5×104 near a wavelength of 1550 nm. Many resonance modes were observed, and double transverse electric modes were identified by theoretical calculations. The quality factor of the microdisks was also analysed to deduce the cavity roughness. The wet etching technique provides a more convenient avenue to fabricate WGM microdisks than conventional fabrication methods.

Key words: whispering gallery mode, wet etching, quality factor

中图分类号:  (Microcavity and microdisk lasers)

  • 42.55.Sa
42.70.Ce (Glasses, quartz)