中国物理B ›› 2016, Vol. 25 ›› Issue (1): 17401-017401.doi: 10.1088/1674-1056/25/1/017401

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Fabrication of superconducting NbN meander nanowires by nano-imprint lithography

Mei Yang(杨美), Li-Hua Liu(刘丽华), Lu-Hui Ning(宁鲁慧), Yi-Rong Jin(金贻荣), Hui Deng(邓辉), Jie Li(李洁), Yang Li(李阳), Dong-Ning Zheng(郑东宁)   

  1. 1. Department of Physics, School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China;
    2. Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
  • 收稿日期:2015-09-09 修回日期:2015-10-14 出版日期:2016-01-05 发布日期:2016-01-05
  • 通讯作者: Dong-Ning Zheng E-mail:dzheng@iphy.ac.cn
  • 基金资助:

    Project supported by the National Basic Research Program of China (Grant Nos. 2011CBA00106 and 2009CB929102) and the National Natural Science Foundation of China (Grant Nos. 11104333 and 10974243).

Fabrication of superconducting NbN meander nanowires by nano-imprint lithography

Mei Yang(杨美)1,2, Li-Hua Liu(刘丽华)1, Lu-Hui Ning(宁鲁慧)2, Yi-Rong Jin(金贻荣)2, Hui Deng(邓辉)2, Jie Li(李洁)2, Yang Li(李阳)1, Dong-Ning Zheng(郑东宁)2   

  1. 1. Department of Physics, School of Mathematics and Physics, University of Science and Technology Beijing, Beijing 100083, China;
    2. Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
  • Received:2015-09-09 Revised:2015-10-14 Online:2016-01-05 Published:2016-01-05
  • Contact: Dong-Ning Zheng E-mail:dzheng@iphy.ac.cn
  • Supported by:

    Project supported by the National Basic Research Program of China (Grant Nos. 2011CBA00106 and 2009CB929102) and the National Natural Science Foundation of China (Grant Nos. 11104333 and 10974243).

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摘要：

Superconducting nanowire single photon detector (SNSPD), as a new type of superconducting single photon detector (SPD), has a broad application prospect in quantum communication and other fields. In order to prepare SNSPD with high performance, it is necessary to fabricate a large area of uniform meander nanowires, which is the core of the SNSPD. In this paper, we demonstrate a process of patterning ultra-thin NbN films into meander-type nanowires by using the nano-imprint technology. In this process, a combination of hot embossing nano-imprint lithography (HE-NIL) and ultraviolet nano-imprint lithography (UV-NIL) is used to transfer the meander nanowire structure from the NIL Si hard mold to the NbN film. We have successfully obtained a NbN nanowire device with uniform line width. The critical temperature (Tc) of the superconducting NbN meander nanowires is about 5 K and the critical current (Ic) is about 3.5 μA at 2.5 K.

关键词: nano-imprint lithography, meander nanowires, ultra-thin NbN films

Abstract:

Superconducting nanowire single photon detector (SNSPD), as a new type of superconducting single photon detector (SPD), has a broad application prospect in quantum communication and other fields. In order to prepare SNSPD with high performance, it is necessary to fabricate a large area of uniform meander nanowires, which is the core of the SNSPD. In this paper, we demonstrate a process of patterning ultra-thin NbN films into meander-type nanowires by using the nano-imprint technology. In this process, a combination of hot embossing nano-imprint lithography (HE-NIL) and ultraviolet nano-imprint lithography (UV-NIL) is used to transfer the meander nanowire structure from the NIL Si hard mold to the NbN film. We have successfully obtained a NbN nanowire device with uniform line width. The critical temperature (Tc) of the superconducting NbN meander nanowires is about 5 K and the critical current (Ic) is about 3.5 μA at 2.5 K.

Key words: nano-imprint lithography, meander nanowires, ultra-thin NbN films

中图分类号:  (Superconducting films and low-dimensional structures)

  • 74.78.-w
74.25.F- (Transport properties) 81.16.Rf (Micro- and nanoscale pattern formation) 81.07.Gf (Nanowires)