Quadruple-stacked Nb/NbxSi1-x/Nb Josephson junctions for large-scale array application

doi:10.1088/1674-1056/ab90e3

中国物理B ›› 2020, Vol. 29 ›› Issue (6): 67404-067404.doi: 10.1088/1674-1056/ab90e3

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application

Wenhui Cao(曹文会), Jinjin Li(李劲劲), Lanruo Wang(王兰若), Yuan Zhong(钟源), Qing Zhong(钟青)

National Institute of Metrology, Beijing 100029, China

收稿日期:2020-04-28 出版日期:2020-06-05 发布日期:2020-06-05
通讯作者: Jinjin Li E-mail:jinjinli@nim.ac.cn
基金资助:
Project supported by the National Key R&D Program of China (Grant No. 2016YFF0200402).

Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application

Wenhui Cao(曹文会), Jinjin Li(李劲劲), Lanruo Wang(王兰若), Yuan Zhong(钟源), Qing Zhong(钟青)

National Institute of Metrology, Beijing 100029, China

Received:2020-04-28 Online:2020-06-05 Published:2020-06-05
Contact: Jinjin Li E-mail:jinjinli@nim.ac.cn
Supported by:
Project supported by the National Key R&D Program of China (Grant No. 2016YFF0200402).

摘要/Abstract

摘要： Large-scale Josephson junction (JJ) arrays are essential in many applications, especially quantum voltage standards application for which hundreds of thousands of junctions are required to realize a high quantum voltage. For almost all applications, high-quality JJ arrays must be realized in a small chip area. This study proposes vertically quadruple-stacked Nb/(Nb_xSi_1-x/Nb)₄ JJs to increase the integration density of junctions in an array. The current-voltage (I-V) characteristics of a single stack of Nb/(Nb_xSi_1-x/Nb)₄ JJs have been measured at 4.2 K. The uniformity of junctions in one stack and the uniformity of several stacks over the entire 2 inches wafer have been analyzed. By optimizing the fabrication parameters, a large-scale quadruple-stacked Nb/(Nb_xSi_1-x/Nb)₄ array consisting of 400000 junctions is realized. Good DC I-V characteristics are obtained, indicating the good uniformity of the large-scale array.

关键词: niobium, Josephson junction array, voltage standard

Abstract: Large-scale Josephson junction (JJ) arrays are essential in many applications, especially quantum voltage standards application for which hundreds of thousands of junctions are required to realize a high quantum voltage. For almost all applications, high-quality JJ arrays must be realized in a small chip area. This study proposes vertically quadruple-stacked Nb/(Nb_xSi_1-x/Nb)₄ JJs to increase the integration density of junctions in an array. The current-voltage (I-V) characteristics of a single stack of Nb/(Nb_xSi_1-x/Nb)₄ JJs have been measured at 4.2 K. The uniformity of junctions in one stack and the uniformity of several stacks over the entire 2 inches wafer have been analyzed. By optimizing the fabrication parameters, a large-scale quadruple-stacked Nb/(Nb_xSi_1-x/Nb)₄ array consisting of 400000 junctions is realized. Good DC I-V characteristics are obtained, indicating the good uniformity of the large-scale array.

Key words: niobium, Josephson junction array, voltage standard

中图分类号: (Superconducting films and low-dimensional structures)

74.78.-w

74.81.Fa (Josephson junction arrays and wire networks) 06.20.fb (Standards and calibration)

曹文会, 李劲劲, 王兰若, 钟源, 钟青. Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application[J]. 中国物理B, 2020, 29(6): 67404-067404.

Wenhui Cao(曹文会), Jinjin Li(李劲劲), Lanruo Wang(王兰若), Yuan Zhong(钟源), Qing Zhong(钟青). Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application[J]. Chin. Phys. B, 2020, 29(6): 67404-067404.

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Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application

Quadruple-stacked Nb/Nb_xSi_1-x/Nb Josephson junctions for large-scale array application

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