Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

doi:10.1088/1674-1056/23/2/027701

中国物理B ›› 2014, Vol. 23 ›› Issue (2): 27701-027701.doi: 10.1088/1674-1056/23/2/027701

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

邱华诚^{a b}, Dara Feili^a, 吴学忠^b, Helmut Seidel^a

a Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany;
b National University of Defense Technology, College of Mechanical Engineering and Automation, Changsha 410073, China

收稿日期:2013-03-21 修回日期:2013-06-14 出版日期:2013-12-12 发布日期:2013-12-12

Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

Qiu Hua-Cheng (邱华诚)^{a b}, Dara Feili^a, Wu Xue-Zhong (吴学忠)^b, Helmut Seidel^a

a Saarland University, Chair of Micromechanics, Microfluidics/Microactuators, 66123 Saarbrücken, Germany;
b National University of Defense Technology, College of Mechanical Engineering and Automation, Changsha 410073, China

Received:2013-03-21 Revised:2013-06-14 Online:2013-12-12 Published:2013-12-12
Contact: Qiu Hua-Cheng E-mail:h.qiu@lmm.uni-saarland.de
About author:77.65.Fs; 85.50.-n

摘要/Abstract

摘要： A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.

关键词: microcantilever, aluminum nitride, torsional mode, quality factor

Abstract: A high quality factor is preferred for a microresonator sensor to improve the sensitivity and resolution. In this paper we systematically investigate the performance of the microcantilever in different resonance modes, which are the first three flexural modes, the first lateral mode, and the first and the second torsional modes. An aluminum nitride-based piezoelectric cantilever is fabricated and tested under controlled pressure from an ultra-high vacuum to a normal atmosphere, using a custom-built vacuum chamber. From the experiment results, it can be seen that the torsional modes exhibit better quality factors than those of the flexural and lateral ones. Finally, an analytical model for the air damping characteristics of the torsional mode cantilever is derived and verified by comparing with experimental results.

Key words: microcantilever, aluminum nitride, torsional mode, quality factor

中图分类号: (Electromechanical resonance; quartz resonators)

77.65.Fs

85.50.-n (Dielectric, ferroelectric, and piezoelectric devices)

邱华诚, Dara Feili, 吴学忠, Helmut Seidel. Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes[J]. 中国物理B, 2014, 23(2): 27701-027701.

Qiu Hua-Cheng (邱华诚), Dara Feili, Wu Xue-Zhong (吴学忠), Helmut Seidel. Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes[J]. Chin. Phys. B, 2014, 23(2): 27701-027701.

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Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

Resonance-mode effect on piezoelectric microcantilever performance in air, with a focus on the torsional modes

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