[1] |
Cui Z and Lawes R A 1997wxJ. Micromech. Microeng.7 128
|
[2] |
Bartek M and Wolffenbuttel R F 1998 wxJ. Micromech. Microeng.8 91
|
[3] |
Bagolini A, Pakula L, Scholtes T L M, Pham H T M, French P J and Sarro P M 2002 wxJ. Micromech. Microeng.12 385
|
[4] |
Teh W H, Liang C T, Mark G and Smith Ch. G 2003 wxJ. Microelectromech. S bf12 641
|
[5] |
Suh H J, Bharathi P, Beebe D J and Moore J S 2000 wxJ. Microelectromech. S bf9 198
|
[6] |
Frederico S, Hibert C, Fritschi R, Fluckiger Ph, Renaud Ph and Ionescu A M 2003 wxProc. 16th IEEE Int. Conf. on Micro Mechanical Systems (MEMS' 03) Kyoto, Japan, Jan. 2003 p570
|
[7] |
Stahl H, Hoechst A, Fischer F, Metzger L, Reichenbach R, Laermer F, Kronmueller S, Breitschwerdt K, Gunn R, Watcham S, Rusu C and Witvrouw A 2003 wxThe 12th Iinternational Conference on Solid State Sensors, Actuators and Microsystems Boston USA, June 2003
|
[8] |
Kim B H, Chung T D, Oh C H and Chun K 2001 wxJ. Microelectromech. S bf10 33
|
[9] |
Srinivasan U, Houston M R, Howe R T and Maboudian R 1998 wxJ. Microelectromech. S bf7 252
|
[10] |
Lee Y I, Park K H, Lee J, Lee C S, Yoo H J, Kim C J and Yoon Y S 1997 wxJ. Microelectromech. S bf6 226
|
[11] |
Kim J Y and Kim C J 1997 wxProc. Tenth Annual IEEE Int. Workshop Micro Electro Mechanical Systems MEMS' 97 Nagoya, Japan, Jan. 1997 p442
|
[12] |
Fan L S 1990 Integrated Micromachinery----Moving Structures on Silicon Chips Ph.D. Dissertation, University of California, Berkeley USA
|
[13] |
David A K, Ramaswammy M, Alex S and Karen W M 1996 Smart MUMPs Design Handbook Including MUMPs Introduction and Design Rules (rev. 4) (MCNC)
|
[14] |
Solgaard O, Daneman M, Tien N C, Friedberger A, Muller R S and Lau K Y 1995 wxIEEE Photonic Tech. L7
|
[15] |
Chan E K L 1999 Characterization and Modeling of Electrostatically Actuated Polysilicon Micromechanical Devices Ph.D. Dissertation, Stanford University, USA
|
[16] |
Warren M E 1998 wxIEEE/LEOS Summer Topical Meetings Monterey CA, July 1998
|
[17] |
Michalicek M A, Corntois J H and Barron C C 1997 wxProceedings of the Second Annual IEEE International Conference on Innovative Systems in Silicon p144
|
[18] |
Kim C J, Kim J Y and Sridharan B 1998 wxSensor Actuat A64 17
|
[19] |
Mastrangelo C H and Hsu C H 1993 wxJ. Microelectromech. S bf2 33
|
[20] |
Mastrangelo C H and Hsu C H 1993 wxJ. Microelectromech. S bf2 44
|
[21] |
Rob L, Harrie A C T, Job E and Miko E 1994 wxSensor Actuat. A43 230
|
[22] |
Liu C, Huang J B, Zhu Z J, Jiang F K, Tung S, Tai Y C and Ho C M 1999 wxJ. Microelectromech. S8
|
[23] |
Shi S L, Yi L, Chen D P, Ou Y, Jing Y P, Ye T C and Cheng Z Y 2008 wxJ. Micro/Nanolithography, MEMS, and MOEMS(JM3)7
|
[24] |
Yi L, Ou Y, Shi S L, Ma J, Chen D P and Ye T C 2008 wxChin. Phys. B17 2130
|
[25] |
Ou Y, Cui F and Sun Y 2003 wxActa Photonica Sinica32 1110
|
[26] |
Shi S L, Jiao B B, Chen D P, Li C B, Ding D Y, Ou Y, Ye T C, Duan Z H, Wu X P and Zhang Q C 2007 wxSensor Actuat. A133 64
|
[27] |
Xiong Z M, Zhang Q C, Chen D P, Wu X P, Guo Z Y, Dong F L, Miao Z Y and Li C B 2007 wxActa Phys. Sin.56 2529 (in Chinese)
|