中国物理B ›› 2007, Vol. 16 ›› Issue (12): 3732-3737.doi: 10.1088/1009-1963/16/12/029

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Large area planar plasma sustained by surface microwave

欧琼荣1, 梁 波2, 梁以资2, 梁荣庆2   

  1. (1)Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China; (2)The Key Laboratory of Applied Ion Beam Physics, the Ministry of Education, Shanghai 200433, China
  • 出版日期:2007-12-20 发布日期:2007-12-20
  • 基金资助:
    Project supported by Prof. Liu Wang-Dong's research project (Grant No~5131502).

Large area planar plasma sustained by surface microwave

Liang Bo(梁波)a), Ou Qiong-Rong(欧琼荣)b), Liang Yi-Zi(梁以资)a), and Liang Rong-Qing(梁荣庆) a)†   

  1. a The Key Laboratory of Applied Ion Beam Physics, the Ministry of Education, Shanghai 200433, China; b Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China
  • Online:2007-12-20 Published:2007-12-20
  • Supported by:
    Project supported by Prof. Liu Wang-Dong's research project (Grant No~5131502).

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摘要： In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface microwave when the electron density is over-dense. From the experimental results we find that the nonuniformities in azimuthal plasma density and electron temperature have been greatly improved and in particular the nonuniformity is less than 10{\%} when the gas pressure is 30 Pa. By improving the antenna shape, enhancing the microwave power and choosing the appropriate gas pressure, the large area planar plasma with high density can be produced.

关键词: microwave, skin depth, surface wave, surface wave plasma

Abstract: In this paper, we show theoretically and experimentally that the large-area planar plasma with high density and good uniformity can be sustained by a surface microwave when the electron density is over-dense. From the experimental results we find that the nonuniformities in azimuthal plasma density and electron temperature have been greatly improved and in particular the nonuniformity is less than 10% when the gas pressure is 30 Pa. By improving the antenna shape, enhancing the microwave power and choosing the appropriate gas pressure, the large area planar plasma with high density can be produced.

Key words: microwave, skin depth, surface wave, surface wave plasma

中图分类号:  (Plasma interactions with antennas; plasma-filled waveguides)

  • 52.40.Fd
52.25.Kn (Thermodynamics of plasmas) 52.35.-g (Waves, oscillations, and instabilities in plasmas and intense beams) 52.70.Ds (Electric and magnetic measurements) 52.70.Gw (Radio-frequency and microwave measurements)