中国物理B ›› 2005, Vol. 14 ›› Issue (9): 1866-1872.doi: 10.1088/1009-1963/14/9/032

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Evaluation of multiaxial stress in textured cubic films by x-ray diffraction

张建民1, 徐可为2   

  1. (1)College of Physics and Information Technology, Shaanxi Normal University, Xian 710062, China; (2)State Key Laboratory for Mechanical Behavior of Materials, Xian Jiaotong University, Xian 710049, China
  • 收稿日期:2004-10-22 修回日期:2005-04-27 出版日期:2005-09-20 发布日期:2005-09-20
  • 基金资助:
    Project supported by the State Key Development Program for Basic Research of China (Grant No 2004CB619302),and the National Natural Science Foundation of China (Grant No 50271038).

Evaluation of multiaxial stress in textured cubic films by x-ray diffraction

Zhang Jian-Min (张建民)a, Xu Ke-Wei (徐可为)b   

  1. a College of Physics and Information Technology, Shaanxi Normal University, Xian 710062, China; b State Key Laboratory for Mechanical Behavior of Materials, Xian Jiaotong University, Xian 710049, China
  • Received:2004-10-22 Revised:2005-04-27 Online:2005-09-20 Published:2005-09-20
  • Supported by:
    Project supported by the State Key Development Program for Basic Research of China (Grant No 2004CB619302),and the National Natural Science Foundation of China (Grant No 50271038).

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摘要： X-ray diffraction is used extensively to determine the residual stress in bulk or thin film materials on the assumptions that the material is composed of fine crystals with random orientation and the stress state is biaxial and homogeneous through the x-ray penetrating region. The stress is calculated from the gradient of \varepsilon \sim \sin ^2\psi linear relation. But the method cannot be used in textured films due to nonlinear relation. In this paper, a novel method is proposed for measuring the multiaxial stresses in cubic films with any \left[ {hkl} \right] fibre texture. As an example, a detailed analysis is given for measuring three-dimensional stresses in FCC films with \left[ {111} \right] fibre texture.

关键词: residual stress, x-ray diffraction, thin film, fibre texture

Abstract: X-ray diffraction is used extensively to determine the residual stress in bulk or thin film materials on the assumptions that the material is composed of fine crystals with random orientation and the stress state is biaxial and homogeneous through the x-ray penetrating region. The stress is calculated from the gradient of $\varepsilon \sim \sin ^2\psi$  linear relation. But the method cannot be used in textured films due to nonlinear relation. In this paper, a novel method is proposed for measuring the multiaxial stresses in cubic films with any [hkl] fibre texture. As an example, a detailed analysis is given for measuring three-dimensional stresses in FCC films with [111] fibre texture.

Key words: residual stress, x-ray diffraction, thin film, fibre texture

中图分类号:  (Mechanical and acoustical properties)

  • 68.60.Bs
62.20.-x (Mechanical properties of solids) 68.55.-a (Thin film structure and morphology) 81.40.Jj (Elasticity and anelasticity, stress-strain relations)