中国物理B ›› 2005, Vol. 14 ›› Issue (9): 1862-1865.doi: 10.1088/1009-1963/14/9/031
张建民1, 张研1, 徐可为2
Zhang Jian-Min (张建民)a, Zhang Yan (张研)a, Xu Ke-Wei (徐可为)b
摘要: Most thin films have different thermal expansion coefficients from their substrates, thus thermal stresses will be introduced into the films when the temperature is changed during annealing and service. Calculations of these stresses for grains in various crystallographic orientations have been made for seven BCC transition metals Cr, Fe, Mo, Nb, Ta, V and W. Neglecting W, which is isotropic and the stresses are equiaxial and without grain orientation (hkl) dependence, the BCC metals may be grouped into two classes. In the first class (Cr, Mo, Nb and V), the (100)-oriented grains have the largest stresses, while the stresses \sigma _1 and \sigma _2 in other (hkl)-oriented grains decrease linearly with the increase of the angle between (hkl) and (100), and with \sigma _1 < \sigma _2 except in (100)- and (111)-oriented grains. In the second class (Fe and Ta), on the contrary, the (100)-oriented grains have the lowest stresses, and the stresses \sigma _1 and \sigma _2 in other (hkl)-oriented grains increase linearly with the increase of the angle between (hkl) and (100), and with \sigma _1 > \sigma _2 except in (100)- and (111)-oriented grains.
中图分类号: (Mechanical and acoustical properties)