中国物理B ›› 2021, Vol. 30 ›› Issue (10): 104201-104201.doi: 10.1088/1674-1056/abec30

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Tunable characteristic of phase-locked quantum cascade laser arrays

Zeng-Hui Gu(顾增辉)1,2, Jin-Chuan Zhang(张锦川)1,†, Huan Wang(王欢)1,2, Peng-Chang Yang(杨鹏昌)1,2, Ning Zhuo(卓宁)1, Shen-Qiang Zhai(翟慎强)1, Jun-Qi Liu(刘俊岐)1,2, Li-Jun Wang(王利军)1,2, Shu-Man Liu(刘舒曼)1,2, Feng-Qi Liu(刘峰奇)1,2,‡, and Zhan-Guo Wang(王占国)1,2   

  1. 1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China;
    2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2021-01-19 修回日期:2021-03-01 接受日期:2021-03-05 出版日期:2021-09-17 发布日期:2021-09-26
  • 通讯作者: Jin-Chuan Zhang, Feng-Qi Liu E-mail:zhangjinchuan@semi.ac.cn;fqliu@semi.ac.cn
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant Nos. 2018YFA0209103 and 2018YFB2200504), the National Natural Science Foundation of China (Grant Nos. 61991430, 61774146, 61790583, 61674144, 61774150, and 61805168), the Beijing Municipal Science & Technology Commission, China (Grant No. Z201100004020006), and the Key Projects of the Chinese Academy of Sciences (Grant Nos. 2018147, YJKYYQ20190002, QYZDJ-SSW-JSC027, and XDB43000000).

Tunable characteristic of phase-locked quantum cascade laser arrays

Zeng-Hui Gu(顾增辉)1,2, Jin-Chuan Zhang(张锦川)1,†, Huan Wang(王欢)1,2, Peng-Chang Yang(杨鹏昌)1,2, Ning Zhuo(卓宁)1, Shen-Qiang Zhai(翟慎强)1, Jun-Qi Liu(刘俊岐)1,2, Li-Jun Wang(王利军)1,2, Shu-Man Liu(刘舒曼)1,2, Feng-Qi Liu(刘峰奇)1,2,‡, and Zhan-Guo Wang(王占国)1,2   

  1. 1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China;
    2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2021-01-19 Revised:2021-03-01 Accepted:2021-03-05 Online:2021-09-17 Published:2021-09-26
  • Contact: Jin-Chuan Zhang, Feng-Qi Liu E-mail:zhangjinchuan@semi.ac.cn;fqliu@semi.ac.cn
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant Nos. 2018YFA0209103 and 2018YFB2200504), the National Natural Science Foundation of China (Grant Nos. 61991430, 61774146, 61790583, 61674144, 61774150, and 61805168), the Beijing Municipal Science & Technology Commission, China (Grant No. Z201100004020006), and the Key Projects of the Chinese Academy of Sciences (Grant Nos. 2018147, YJKYYQ20190002, QYZDJ-SSW-JSC027, and XDB43000000).

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摘要： A multimode interference (MMI) structure is designed to simplify the fabrication of quantum cascade laser (QCL) phase-locked arrays. The MMI geometry is optimized with a sufficient output channel distance to accommodate conventional photolithography and wet etching process by which power amplifier array is fabricated without using the complicated two-step etching-regrowth or dry etching technique. The far-field pattern with periodically modulated peaks reveals that the beams from the arrays are phase-locked. Furthermore, the frequency tuning performance of the MMI-based phase-locked arrays is studied using the Littrow-configuration external cavity structure. A wavelength tuning range of more than 60 cm-1 is demonstrated, which will eventually realize the high power, frequency tunable, large-scale phase-locked arrays, and their application in spectroscopy.

关键词: multimode interference (MMI), phase-locked, quantum cascade laser (QCL), external cavity

Abstract: A multimode interference (MMI) structure is designed to simplify the fabrication of quantum cascade laser (QCL) phase-locked arrays. The MMI geometry is optimized with a sufficient output channel distance to accommodate conventional photolithography and wet etching process by which power amplifier array is fabricated without using the complicated two-step etching-regrowth or dry etching technique. The far-field pattern with periodically modulated peaks reveals that the beams from the arrays are phase-locked. Furthermore, the frequency tuning performance of the MMI-based phase-locked arrays is studied using the Littrow-configuration external cavity structure. A wavelength tuning range of more than 60 cm-1 is demonstrated, which will eventually realize the high power, frequency tunable, large-scale phase-locked arrays, and their application in spectroscopy.

Key words: multimode interference (MMI), phase-locked, quantum cascade laser (QCL), external cavity

中图分类号:  (Wave propagation, transmission and absorption)

  • 42.25.Bs
42.55.Px (Semiconductor lasers; laser diodes) 42.60.Fc (Modulation, tuning, and mode locking) 42.82.Et (Waveguides, couplers, and arrays)