中国物理B ›› 2017, Vol. 26 ›› Issue (3): 35201-035201.doi: 10.1088/1674-1056/26/3/035201

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

Qi Wang(王奇), Xiao-Li Yu(于晓丽), De-Zhen Wang(王德真)   

  1. School of Physics and Optoelectronic Engineering, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Chinese Ministry of Education, Dalian University of Technology, Dalian 116023, China
  • 收稿日期:2016-10-24 修回日期:2016-12-08 出版日期:2017-03-05 发布日期:2017-03-05
  • 通讯作者: De-Zhen Wang E-mail:wangdez@dlut.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Granted Nos. 11405022 and 11475040) and Dalian High Level Talent Innovation Support Plan, China (Grant No. 2015R050).

Numerical study on the gas heating mechanism in pulse-modulated radio-frequency glow discharge

Qi Wang(王奇), Xiao-Li Yu(于晓丽), De-Zhen Wang(王德真)   

  1. School of Physics and Optoelectronic Engineering, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Chinese Ministry of Education, Dalian University of Technology, Dalian 116023, China
  • Received:2016-10-24 Revised:2016-12-08 Online:2017-03-05 Published:2017-03-05
  • Contact: De-Zhen Wang E-mail:wangdez@dlut.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Granted Nos. 11405022 and 11475040) and Dalian High Level Talent Innovation Support Plan, China (Grant No. 2015R050).

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摘要： The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature (Tg) in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that Tg decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the Tg, were studied. It was found that Tg decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the Tg can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from α to γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of Tg in the two modes show different features and the ion Joule heating is more important during the mode transition.

关键词: gas heating, pulse-modulated rf discharge, atmospheric pressure glow discharge

Abstract: The gas heating mechanism in the pulse-modulated radio-frequency (rf) discharge at atmospheric pressure was investigated with a one-dimensional two-temperature fluid model. Firstly, the spatiotemporal profiles of the gas temperature (Tg) in both consistent rf discharge and pulse-modulated rf discharge were compared. The results indicated that Tg decreases considerably with the pulse-modulated power, and the elastic collision mechanism plays a more important role in the gas heating change. Secondly, the influences of the duty cycle on the discharge parameters, especially on the Tg, were studied. It was found that Tg decreases almost linearly with the reduction of the duty cycle, and there exists one ideal value of the duty cycle, by which both the Tg can be adjusted and the glow mode can be sustained. Thirdly, the discharge mode changing from α to γ mode in the pulse-modulated rf discharge was investigated, the spatial distributions of Tg in the two modes show different features and the ion Joule heating is more important during the mode transition.

Key words: gas heating, pulse-modulated rf discharge, atmospheric pressure glow discharge

中图分类号:  (Elementary processes in plasmas)

  • 52.20.-j
52.25.-b (Plasma properties) 52.40.Kh (Plasma sheaths)