中国物理B ›› 2008, Vol. 17 ›› Issue (6): 2130-2136.doi: 10.1088/1674-1056/17/6/031
马瑾1, 欧毅2, 石莎莉2, 陈大鹏2, 叶甜春2, 易亮3
Yi Liang(易亮)a)b), Ou Yi(欧毅)a)†, Shi Sha-Li(石莎莉)a)‡, Ma Jin(马瑾)b), Chen Da-Peng(陈大鹏)a), and Ye Tian-Chun(叶甜春)a)
摘要: This paper describes a micro thermal shear stress sensor with a cavity underneath, based on vacuum anodic bonding and bulk micromachined technology. A Ti/Pt alloy strip, 2$\mu $m$\times $100$\mu $m, is deposited on the top of a thin silicon nitride diaphragm and functioned as the thermal sensor element. By using vacuum anodic bonding and bulk-si anisotropic wet etching process instead of the sacrificial-layer technique, a cavity, functioned as the adiabatic vacuum chamber, 200$\mu $m$\times $200$\mu $m$^{ }\times $400$\mu $m, is placed between the silicon nitride diaphragm and glass (Corning 7740). This method totally avoid adhesion problem which is a major issue of the sacrificial-layer technique.
中图分类号: (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)