中国物理B ›› 2008, Vol. 17 ›› Issue (2): 721-725.doi: 10.1088/1674-1056/17/2/060

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Preparation, structure and ferromagnetic properties of the nanocrystalline Ti1-x MnxO2 thin films grown by radio frequency magnetron co-sputtering

刘发民1, 丁 芃2, 杨新安3, 李建奇3   

  1. (1)Department of Physics, School of Sciences, Beijing University of Aeronautics and Astronautics, Beijing 100083, China; (2)Department of Physics, School of Sciences,Beijing University of Aeronautics and Astronautics, Beijing 100083, China; (3)Laboratory for Advanced Materials & Electron Microscopy, Institute of Physics, Chinese Academy of Sciences,Beijing 100080, China
  • 收稿日期:2007-04-13 修回日期:2007-06-20 出版日期:2008-02-20 发布日期:2008-02-20
  • 基金资助:
    Project supported by the Aeronautical Science foundation of China (Grant No 2003ZG51069) and the National Defence Base Research of China.

Preparation, structure and ferromagnetic properties of the nanocrystalline Ti1-x MnxO2 thin films grown by radio frequency magnetron co-sputtering

Ding Peng(丁芃)a), Liu Fa-Min(刘发民)a)†, Yang Xin-An(杨新安)b), and Li Jian-Qi(李建奇)b)   

  1. a Department of Physics, School of Sciences, Beijing University of Aeronautics and Astronautics, Beijing 100083, China; b Laboratory for Advanced Materials & Electron Microscopy, Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • Received:2007-04-13 Revised:2007-06-20 Online:2008-02-20 Published:2008-02-20
  • Supported by:
    Project supported by the Aeronautical Science foundation of China (Grant No 2003ZG51069) and the National Defence Base Research of China.

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摘要： This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron co-sputtering. X-ray diffraction measurements indicate that the samples are easy to form the rutile structure, and the sizes of the crystal grains grow big and big as the Mn concentration increases. X-ray photoemission spectroscopy measurements and high resolution transmission electron microscope photographs confirm that the manganese ions have been effectively doped into the TiO2 crystal when the Mn concentration is lower than 21%. The magnetic property measurements show that the Ti1-xMnxO2 (x=0.21) films are ferromagnetic at room temperature, and the saturation magnetization, coercivity, and saturation field are 16.0emu/cm3, 167.5×80A/m and 3740×80A/m at room temperature, respectively. The room-temperature ferromagnetism of the films can be attributed to the new rutile Ti1-xMnxO2 structure formed by the substitution of Mn4+ for Ti4+ into the TiO2 crystal lattice, and could be explained by O vacancy (VO)-enhanced ferromagnetism model.

关键词: RF magnetron sputtering, Mn-doped TiO2 films, room-temperature ferromagnetic properties

Abstract: This paper reported that the Mn-doped TiO2 films were prepared by radio frequency (RF) magnetron co-sputtering. X-ray diffraction measurements indicate that the samples are easy to form the rutile structure, and the sizes of the crystal grains grow big and big as the Mn concentration increases. X-ray photoemission spectroscopy measurements and high resolution transmission electron microscope photographs confirm that the manganese ions have been effectively doped into the TiO2 crystal when the Mn concentration is lower than 21%. The magnetic property measurements show that the Ti1-xMnxO2 (x=0.21) films are ferromagnetic at room temperature, and the saturation magnetization, coercivity, and saturation field are 16.0emu/cm3, 167.5×80A/m and 3740×80A/m at room temperature, respectively. The room-temperature ferromagnetism of the films can be attributed to the new rutile Ti1-xMnxO2 structure formed by the substitution of Mn4+ for Ti4+ into the TiO2 crystal lattice, and could be explained by O vacancy (VO)-enhanced ferromagnetism model.

Key words: RF magnetron sputtering, Mn-doped TiO2 films, room-temperature ferromagnetic properties

中图分类号:  (Methods of micro- and nanofabrication and processing)

  • 81.16.-c
81.15.Cd (Deposition by sputtering) 68.55.-a (Thin film structure and morphology) 75.70.Ak (Magnetic properties of monolayers and thin films) 75.60.Ej (Magnetization curves, hysteresis, Barkhausen and related effects)