中国物理B ›› 2008, Vol. 17 ›› Issue (2): 716-720.doi: 10.1088/1674-1056/17/2/059
顾广瑞1, 吴宝嘉1, 金 哲1, Ito Toshimichi2
Gu Guang-Rui(顾广瑞)a)†, Wu Bao-Jia(吴宝嘉)a), Jin Zhe(金哲)a), and Ito Toshimichib)
摘要: This paper reported that the nano-catkin carbon films were prepared on Si substrates by means of electron cyclotron resonance microwave plasma chemical vapour deposition in a hydrogen and methane mixture. The surface morphology and the structure of the fabricated films were characterized by using scanning electron microscopes and Raman spectroscopy, respectively. The stable field emission properties with a low threshold field of 5V/$\mu $m corresponding to a current density of about 1$\mu $A/cm$^{2}$ and a current density of 3.2mA/cm$^{2}$ at an electric field of 10V/$\mu $m were obtained from the carbon film deposited at CH$_{4}$ concentration of 8{\%}. The mechanism that the threshold field decreased with the increase of the CH$_{4}$ concentration and the high emission current appeared at the high CH$_{4}$ concentration was explained by using the Fowler--Nordheim theory.
中图分类号: (Field emission, ionization, evaporation, and desorption)