中国物理B ›› 2004, Vol. 13 ›› Issue (8): 1309-1314.doi: 10.1088/1009-1963/13/8/022

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Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method

张谷令, 王久丽, 刘元富, 刘赤子, 杨思泽   

  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • 收稿日期:2003-12-09 修回日期:2004-04-08 出版日期:2004-06-21 发布日期:2005-06-25
  • 基金资助:
    Project supported by the National High Technology Development Programme of China (Grant No 2002A331020), the National Natural Science Foundation of China (Grant No 50071068 and 10275088), the Science and Technology Program of Beijing Municipal Science and

Properties of TiN coating on 45# steel for inner surface modification by grid-enhanced plasma source ion implantation method

Zhang Gu-Ling (张谷令), Wang Jiu-Li (王久丽), Liu Yuan-Fu (刘元富), Liu Chi-Zi (刘赤子), Yang Si-Ze (杨思泽)   

  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080, China
  • Received:2003-12-09 Revised:2004-04-08 Online:2004-06-21 Published:2005-06-25
  • Supported by:
    Project supported by the National High Technology Development Programme of China (Grant No 2002A331020), the National Natural Science Foundation of China (Grant No 50071068 and 10275088), the Science and Technology Program of Beijing Municipal Science and

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摘要： Using a new inner surface modification method named GEPSII (grid-enhanced plasma source ion implantation), which is designed for inner surface modification of tubular work pieces, we successfully produced polycrystalline TiN coating on 0.45% C steel (45^# steel) samples. Compared with the uncoated 45^# steel sample, the electrochemical corrosion test on the coated 45^# steel samples presents evident improvement in their corrosion resistance. Two implanted voltages, direct current (－2kV) and pulsed negative voltage (－10kV), are applied on the substrates. It is shown that the direct current implantation is more effective than the pulsed implantation in the surface corrosion resistance. AES depth profile shows that coating thickness is about tens of nanometres. The preferred orientations expressed by peaks at (111) and (200) can be seen clearly in XRD patterns.

关键词: PSII, inner surface, TiN, corrosion resistance

Abstract: Using a new inner surface modification method named GEPSII (grid-enhanced plasma source ion implantation), which is designed for inner surface modification of tubular work pieces, we successfully produced polycrystalline TiN coating on 0.45% C steel (45# steel) samples. Compared with the uncoated 45# steel sample, the electrochemical corrosion test on the coated 45# steel samples presents evident improvement in their corrosion resistance. Two implanted voltages, direct current (－2kV) and pulsed negative voltage (－10kV), are applied on the substrates. It is shown that the direct current implantation is more effective than the pulsed implantation in the surface corrosion resistance. AES depth profile shows that coating thickness is about tens of nanometres. The preferred orientations expressed by peaks at (111) and (200) can be seen clearly in XRD patterns.

Key words: PSII, inner surface, TiN, corrosion resistance

中图分类号:  (Corrosion protection)

  • 81.65.Kn
61.82.Bg (Metals and alloys)