中国物理B ›› 2023, Vol. 32 ›› Issue (4): 44212-044212.doi: 10.1088/1674-1056/ac81a9

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Design and simulation of a silicon-based hybrid integrated optical gyroscope system

Dao-Xin Sun(孙道鑫)1, Dong-Liang Zhang(张东亮)1,†, Li-Dan Lu(鹿利单)1, Tao Xu(徐涛)1, Xian-Tong Zheng(郑显通)1, Zhe-Hai Zhou(周哲海)2,‡, and Lian-Qing Zhu(祝连庆)1   

  1. 1 Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science&Technology University, Beijing 100192, China;
    2 Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science&Technology University, Beijing 100016, China
  • 收稿日期:2022-05-05 修回日期:2022-07-11 接受日期:2022-07-18 出版日期:2023-03-10 发布日期:2023-04-04
  • 通讯作者: Dong-Liang Zhang, Zhe-Hai Zhou E-mail:zdl_photonics@bistu.edu.cn;zhouzhehai@bistu.edu.cn
  • 基金资助:
    Project supported by the science and technology general project of Beijing Municipal Education Commission (Grant No. KM202111232019), Beijing Municipal Natural Science Foundation (Grant No. 2214058), the Discipline Innovation Program of Higher Education (Grant No. D17021), the Open Project of the State Key Laboratory of Integrated Optoelectronics (Grant No. IOSKL2020KF22), Beijing Great Wall Scholars Program (Grant No. CIT&TCD20190323), the National Natural Science Foundation of China (Grant No. 61875237), and Beijing Youth Talent Support Program (Grant No. Z2019042).

Design and simulation of a silicon-based hybrid integrated optical gyroscope system

Dao-Xin Sun(孙道鑫)1, Dong-Liang Zhang(张东亮)1,†, Li-Dan Lu(鹿利单)1, Tao Xu(徐涛)1, Xian-Tong Zheng(郑显通)1, Zhe-Hai Zhou(周哲海)2,‡, and Lian-Qing Zhu(祝连庆)1   

  1. 1 Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science&Technology University, Beijing 100192, China;
    2 Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science&Technology University, Beijing 100016, China
  • Received:2022-05-05 Revised:2022-07-11 Accepted:2022-07-18 Online:2023-03-10 Published:2023-04-04
  • Contact: Dong-Liang Zhang, Zhe-Hai Zhou E-mail:zdl_photonics@bistu.edu.cn;zhouzhehai@bistu.edu.cn
  • Supported by:
    Project supported by the science and technology general project of Beijing Municipal Education Commission (Grant No. KM202111232019), Beijing Municipal Natural Science Foundation (Grant No. 2214058), the Discipline Innovation Program of Higher Education (Grant No. D17021), the Open Project of the State Key Laboratory of Integrated Optoelectronics (Grant No. IOSKL2020KF22), Beijing Great Wall Scholars Program (Grant No. CIT&TCD20190323), the National Natural Science Foundation of China (Grant No. 61875237), and Beijing Youth Talent Support Program (Grant No. Z2019042).

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摘要： By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4 resonator with silicon-based photonics technology, a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper. The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link, which provides a theoretical design reference to improve the system's sensitivity. When the wavelength is 1550 nm, the conversion frequency of the dual-ring optical path is 50 MHz, the coupling coefficient is 0.2, and the radius R is 1000 μm, the quality factor of the silicon-based Si3N4 resonator is 2.58×105, which is 1.58 times that of the silicon-on-insulator resonator. Moreover, the effective number of times the light travels around the ring before leaving the micro-ring is 5.93, which is 1.62 times that of the silicon-on-insulator resonator. The work fits the gyro dynamic output diagram, and solves the problem of low sensitivity at low speed by setting the phase offset. This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.

关键词: silicon photonics, integrated optical gyroscope, micro-ring resonator, Sagnac effect

Abstract: By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4 resonator with silicon-based photonics technology, a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper. The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link, which provides a theoretical design reference to improve the system's sensitivity. When the wavelength is 1550 nm, the conversion frequency of the dual-ring optical path is 50 MHz, the coupling coefficient is 0.2, and the radius R is 1000 μm, the quality factor of the silicon-based Si3N4 resonator is 2.58×105, which is 1.58 times that of the silicon-on-insulator resonator. Moreover, the effective number of times the light travels around the ring before leaving the micro-ring is 5.93, which is 1.62 times that of the silicon-on-insulator resonator. The work fits the gyro dynamic output diagram, and solves the problem of low sensitivity at low speed by setting the phase offset. This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.

Key words: silicon photonics, integrated optical gyroscope, micro-ring resonator, Sagnac effect

中图分类号:  (Sensors, gyros)

  • 42.81.Pa
42.82.Et (Waveguides, couplers, and arrays) 42.82.-m (Integrated optics) 42.82.Fv (Hybrid systems)