中国物理B ›› 2023, Vol. 32 ›› Issue (4): 44212-044212.doi: 10.1088/1674-1056/ac81a9
Dao-Xin Sun(孙道鑫)1, Dong-Liang Zhang(张东亮)1,†, Li-Dan Lu(鹿利单)1, Tao Xu(徐涛)1, Xian-Tong Zheng(郑显通)1, Zhe-Hai Zhou(周哲海)2,‡, and Lian-Qing Zhu(祝连庆)1
Dao-Xin Sun(孙道鑫)1, Dong-Liang Zhang(张东亮)1,†, Li-Dan Lu(鹿利单)1, Tao Xu(徐涛)1, Xian-Tong Zheng(郑显通)1, Zhe-Hai Zhou(周哲海)2,‡, and Lian-Qing Zhu(祝连庆)1
摘要: By combining a silicon-based lithium niobate modulator and a silicon-based Si3N4 resonator with silicon-based photonics technology, a highly systematic design of a hybrid integrated optical gyroscope with enhanced reciprocity sensitivity and a dual micro-ring structure is proposed for the first time in this paper. The relationship between the device's structural parameters and optical performance is also analyzed by constructing a complete simulation link, which provides a theoretical design reference to improve the system's sensitivity. When the wavelength is 1550 nm, the conversion frequency of the dual-ring optical path is 50 MHz, the coupling coefficient is 0.2, and the radius R is 1000 μm, the quality factor of the silicon-based Si3N4 resonator is 2.58×105, which is 1.58 times that of the silicon-on-insulator resonator. Moreover, the effective number of times the light travels around the ring before leaving the micro-ring is 5.93, which is 1.62 times that of the silicon-on-insulator resonator. The work fits the gyro dynamic output diagram, and solves the problem of low sensitivity at low speed by setting the phase offset. This results provide a basis for the further optimization of design and chip processing of the integrated optical gyroscope.
中图分类号: (Sensors, gyros)