High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler

doi:10.1088/1674-1056/ac0dac

中国物理B ›› 2022, Vol. 31 ›› Issue (2): 24203-024203.doi: 10.1088/1674-1056/ac0dac

High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler

Shao-Yang Li(李绍洋)^1,3, Liang-Liang Wang(王亮亮)^1,†, Dan Wu(吴丹)^1,3, Jin You(游金)^1,3, Yue Wang(王玥)¹, Jia-Shun Zhang(张家顺)¹, Xiao-Jie Yin(尹小杰)¹, Jun-Ming An(安俊明)^1,2,3, and Yuan-Da Wu(吴远大)^1,2,3

1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
3 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

收稿日期:2021-05-21 修回日期:2021-06-18 接受日期:2021-06-23 出版日期:2022-01-13 发布日期:2022-01-26
通讯作者: Liang-Liang Wang E-mail:wangliangl09@semi.ac.cn
基金资助:
Project supported by the National Key Research and Development Program of China (Grant No. 2019YFB2203001), the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No. XDB43000000), and the National Natural Science Foundation of China (Grant No. 61805232).

High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler

1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China;
3 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

Received:2021-05-21 Revised:2021-06-18 Accepted:2021-06-23 Online:2022-01-13 Published:2022-01-26
Contact: Liang-Liang Wang E-mail:wangliangl09@semi.ac.cn
Supported by:
Project supported by the National Key Research and Development Program of China (Grant No. 2019YFB2203001), the Strategic Priority Research Program of the Chinese Academy of Sciences (Grant No. XDB43000000), and the National Natural Science Foundation of China (Grant No. 61805232).

摘要/Abstract

摘要： Since the advent of three-dimensional photonic integrated circuits, the realization of efficient and compact optical interconnection between layers has become an important development direction. A vertical interlayer coupler between two silicon layers is presented in this paper. The coupling principle of the directional coupler is analyzed, and the traditional method of using a pair of vertically overlapping inverse taper structures is improved. For the coupling of two rectangular waveguide layers, a pair of nonlinear tapers with offset along the transmission direction is demonstrated. For the coupling of two ridge waveguide layers, a nonlinear taper in each layer is used to achieve high coupling efficiency. The simulation results show that the coupling efficiency of the two structures can reach more than 90% in a wavelength range from 1500 nm to 1650 nm. Moreover, the crosstalk is reduced to less than -50 dB by using multimode waveguides at intersections. The vertical interlayer coupler with a nonlinear taper is expected to realize the miniaturization and dense integration of photonic integrated chips.

关键词: silicon photonics, vertical coupling, nonlinear tapers, three-dimensional integration

Abstract: Since the advent of three-dimensional photonic integrated circuits, the realization of efficient and compact optical interconnection between layers has become an important development direction. A vertical interlayer coupler between two silicon layers is presented in this paper. The coupling principle of the directional coupler is analyzed, and the traditional method of using a pair of vertically overlapping inverse taper structures is improved. For the coupling of two rectangular waveguide layers, a pair of nonlinear tapers with offset along the transmission direction is demonstrated. For the coupling of two ridge waveguide layers, a nonlinear taper in each layer is used to achieve high coupling efficiency. The simulation results show that the coupling efficiency of the two structures can reach more than 90% in a wavelength range from 1500 nm to 1650 nm. Moreover, the crosstalk is reduced to less than -50 dB by using multimode waveguides at intersections. The vertical interlayer coupler with a nonlinear taper is expected to realize the miniaturization and dense integration of photonic integrated chips.

Key words: silicon photonics, vertical coupling, nonlinear tapers, three-dimensional integration

中图分类号: (Integrated optics)

42.82.-m

42.82.Et (Waveguides, couplers, and arrays) 42.79.Gn (Optical waveguides and couplers)

Shao-Yang Li(李绍洋), Liang-Liang Wang(王亮亮), Dan Wu(吴丹), Jin You(游金), Yue Wang(王玥), Jia-Shun Zhang(张家顺), Xiao-Jie Yin(尹小杰), Jun-Ming An(安俊明), and Yuan-Da Wu(吴远大). High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler[J]. 中国物理B, 2022, 31(2): 24203-024203.

参考文献

[1] Zhou Z P, Tu Z J, Yin B, Tan W, Yu L, Yi H X and Wang X J 2013 Chin. Opt. Lett. 11 012501
[2] Chen X F 2019 J. Semicond. 40 050301
[3] Itoh K, Kuno Y, Hayashi Y, Suzuki J, Hojo N, Amemiya T, Nishiyama N and Arai S 2016 IEEE J. Sel. Top. Quantum Electron. 22 255
[4] Yuan P, Wang Y, Wu Y D, An J M and Hu X W 2018 Chin. Phys. B 27 124208
[5] Yuan P, Wu Y, Wang Y, An J and Hu X 2015 J. Semicond. 36 084005
[6] Xu H, Li X Y, Xiao X, Li Z Y, Yu Y D and Yu J Z 2013 Chin. Phys. B 22 114212
[7] Wu D Y, Hu X, Li W Z, Chen D G, Wang L and Xiao X 2021 J. Semicond. 42 020502
[8] Suzuki K, Namiki S, Kawashima H, Ikeda K, Konoike R, Yokoyama N, Seki M, Ohtsuka M, Saitoh S, Suda S, Matsuura H and Yamada K 2020 Journal of Lightwave Technology 38 226
[9] JoonHyun K, Atsumi Y, Hayashi Y, Suzuki J, Kuno Y, Amemiya T, Nishiyama N and Arai S 2014 IEEE J. Sel. Top. Quantum Electron. 20 317
[10] Kang J, Atsumi Y, Oda M, Amemiya T, Nishiyama N and Arai S 2012 Jpn. J. Appl. Phys. 51 120203
[11] Sodagar M, Pourabolghasem R, Eftekhar A A and Adibi A 2014 Opt. Express 22 16767
[12] Sun R, Beals M, Pomerene A, Cheng J, Hong C Y, Kimerling L and Michel J 2008 Opt. Express 16 11682
[13] Huang Y, Song J, Luo X, Liow T Y and Lo G Q 2014 Opt. Express 22 21859
[14] Li L, Lin H T, Qiao S T, Zou Y, Danto S, Richardson K, Musgraves J D, Lu N S and Hu J J 2014 Nat. Photon. 8 643
[15] Sacher W D, Mikkelsen J C, Huang Y, Mak J C C, Yong Z, Luo X S, Li Y, Dumais P, Jiang J, Goodwill D, Bernier E, Lo P G Q and Poon J K S 2018 Proceed. IEEE 106 2232
[16] Singaravelu P K J, Devarapu G C R, Schulz S A, Wilmart Q, Malhouitre S, Olivier S and O'Faolain L 2019 J. Phys. D:Appl. Phys. 52 214001
[17] Maegami Y, Okano M, Cong G, Ohno M and Yamada K 2016 Opt. Express 24 16856
[18] Huang W P 1994 J. Opt. Soc. Am. A 11 963
[19] Marcatili E A J 1969 The Bell System Technical Journal 48 2071

High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler

High efficiency, small size, and large bandwidth vertical interlayer waveguide coupler

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 7

Metrics

本文评价

推荐阅读 0

[1]	Changjian Xie(解长健), Xihua Zou (邹喜华), Fang Zou(邹放), Lianshan Yan(闫连山), Wei Pan(潘炜), and Yong Zhang(张永). A 32-channel 100 GHz wavelength division multiplexer by interleaving two silicon arrayed waveguide gratings[J]. 中国物理B, 2021, 30(12): 120703-120703.
[2]	袁配, 王玥, 吴远大, 安俊明, 胡雄伟. 16-channel dual-tuning wavelength division multiplexer/demultiplexer[J]. 中国物理B, 2018, 27(12): 124208-124208.
[3]	邵福会, 张一, 苏向斌, 谢圣文, 尚金铭, 赵云昊, 蔡晨元, 车仁超, 徐应强, 倪海桥, 牛智川. 1.3-μm InAs/GaAs quantum dots grown on Si substrates[J]. 中国物理B, 2018, 27(12): 128105-128105.
[4]	O. Semenova, A. Kozelskaya, Li Zhi-Yong, Yu Yu-De. Mechanical strains in pecvd SiN_x:H films for nanophotonic application[J]. 中国物理B, 2015, 24(10): 106801-106801.
[5]	廖莎莎, 杨婷, 董建绩. On-chip optical pulse shaper for arbitrary waveform generation[J]. , 2014, 23(7): 73201-073201.
[6]	杨彪, 李智勇, 俞育德, 余金中. High-efficiency focusing grating coupler with optimized ultra-short taper[J]. 中国物理B, 2014, 23(11): 114206-114206.
[7]	周亮, 李智勇, 朱宇, 李运涛, 樊中朝, 韩伟华, 俞育德, 余金中. A novel highly efficient grating coupler with large filling factor used for optoelectronic integration[J]. 中国物理B, 2010, 19(12): 124214-124214.