Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device

doi:10.1088/1674-1056/25/7/075201

中国物理B ›› 2016, Vol. 25 ›› Issue (7): 75201-075201.doi: 10.1088/1674-1056/25/7/075201

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device

Z A Umar, R Ahmad, R S Rawat, M A Baig, J Siddiqui, T Hussain

1 National Centre for Physics, Quaid-i-Azam University Campus, Islamabad, 54320 Pakistan;
2 Department of Physics, GC University, Lahore 54000, Pakistan;
3 NSSE, National Institute of Education, Nanyang Technological University, Singapore 637616, Singapore;
4 Centre for Advanced Studies in Physics, GC University, Lahore 54000, Pakistan

收稿日期:2016-01-08 修回日期:2016-03-02 出版日期:2016-07-05 发布日期:2016-07-05
通讯作者: Z A Umar E-mail:zeshanumar_502@hotmail.com

Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device

Z A Umar¹, R Ahmad², R S Rawat³, M A Baig¹, J Siddiqui⁴, T Hussain⁴

1 National Centre for Physics, Quaid-i-Azam University Campus, Islamabad, 54320 Pakistan;
2 Department of Physics, GC University, Lahore 54000, Pakistan;
3 NSSE, National Institute of Education, Nanyang Technological University, Singapore 637616, Singapore;
4 Centre for Advanced Studies in Physics, GC University, Lahore 54000, Pakistan

Received:2016-01-08 Revised:2016-03-02 Online:2016-07-05 Published:2016-07-05
Contact: Z A Umar E-mail:zeshanumar_502@hotmail.com

摘要/Abstract

摘要： The Al-C-N films are deposited on Si substrates by using a dense plasma focus (DPF) device with aluminum fitted central electrode (anode) and by operating the device with CH₄/N₂ gas admixture ratio of 1:1. XRD results verify the crystalline AlN (111) and Al₃CON (110) phase formation of the films deposited using multiple shots. The elemental compositions as well as chemical states of the deposited Al-C-N films are studied using XPS analysis, which affirm Al-N, C-C, and C-N bonding. The FESEM analysis reveals that the deposited films are composed of nanoparticles and nanoparticle agglomerates. The size of the agglomerates increases at a higher number of focus deposition shots for multiple shot depositions. Nanoindentation results reveal the variation in mechanical properties (nanohardness and elastic modulus) of Al-C-N films deposited with multiple shots. The highest values of nanohardness and elastic modulus are found to be about 11 and 185 GPa, respectively, for the film deposited with 30 focus deposition shots. The mechanical properties of the films deposited using multiple shots are related to the Al content and C-N bonding.

关键词: dense plasma focus, XPS, field emission scanning electron microscope, elastic modulus

Abstract: The Al-C-N films are deposited on Si substrates by using a dense plasma focus (DPF) device with aluminum fitted central electrode (anode) and by operating the device with CH₄/N₂ gas admixture ratio of 1:1. XRD results verify the crystalline AlN (111) and Al₃CON (110) phase formation of the films deposited using multiple shots. The elemental compositions as well as chemical states of the deposited Al-C-N films are studied using XPS analysis, which affirm Al-N, C-C, and C-N bonding. The FESEM analysis reveals that the deposited films are composed of nanoparticles and nanoparticle agglomerates. The size of the agglomerates increases at a higher number of focus deposition shots for multiple shot depositions. Nanoindentation results reveal the variation in mechanical properties (nanohardness and elastic modulus) of Al-C-N films deposited with multiple shots. The highest values of nanohardness and elastic modulus are found to be about 11 and 185 GPa, respectively, for the film deposited with 30 focus deposition shots. The mechanical properties of the films deposited using multiple shots are related to the Al content and C-N bonding.

Key words: dense plasma focus, XPS, field emission scanning electron microscope, elastic modulus

中图分类号: (Dense plasma focus)

52.59.Hq

79.60.-i (Photoemission and photoelectron spectra) 68.37.Vj (Field emission and field-ion microscopy) 62.20.de (Elastic moduli)

Z A Umar, R Ahmad, R S Rawat, M A Baig, J Siddiqui, T Hussain. Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device[J]. 中国物理B, 2016, 25(7): 75201-075201.

Z A Umar, R Ahmad, R S Rawat, M A Baig, J Siddiqui, T Hussain. Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device[J]. Chin. Phys. B, 2016, 25(7): 75201-075201.

参考文献 30

[1]	Liu A Y and Cohen M L 1989 Science 245 841
[2]	Liu A Y and Cohen M L 1990 Phys. Rev. B 41 10727
[3]	Neidhard J and Hultman L 2007 J. Vac. Sci. Tech. A 25 633
[4]	Interrante L V, Lee W, McConnell M, Lewis N and Hall E 1989 J. Electrochem. Soc. 136 472
[5]	Jiang N, Xu S, Ostrikov K N, Tsakadze E L, Long J D, Chai J W and Tsakadze Z L 2002 Int. J. Mod. Phys. B 16 1132
[6]	Ji A L, Du Y, Ma L B and Cao Z X 2005 J. Cryst. Growth 279 420
[7]	Ji A L, Ma L B, Liu C, Li C R and Cao Z X 2005 Diamond Rel. Mater. 14 1348
[8]	Ji A L, Ma L B, Liu C, Zheng P, Li C R and Cao Z X 2005 Appl. Phys. Lett. 86 021918
[9]	Luo Q H, Lu Y H and Lou Y Z 2011 Appl. Surf. Sci. 257 6079
[10]	Luo Q H, Lu Y H, Lou Y Z, Wang Y B and Yu D L 2010 Thin Solid Film. 518 7038
[11]	Uglov V V, Cherenda N N, Khodasevich V V, Sokol V A, Abramov I I, Danilyuk A L, Wenzel A, Gerlach J and Rauschenbach B 1999 Nuclear Instruments and Methods in Physics Research Section B 147 332
[12]	Lee S, Tou T Y, Moo S P, Eissa M A, Gholap A V, Kwek K W, Mulyodrono S, Smith A J, Suriyadi S, Usada W and Zakaullah M 1988 Am. J. Phys. 56 62
[13]	Hassan M, Qayyum A, Ahmad S, Mahmood S, Shafiq M, Zakaullah M, Lee P and Rawat R S 2014 Appl. Surf. Sci. 303 187
[14]	Khan I A, Rawat R S, Ahmad R and Shahid M A K 2014 Appl. Surf. Sci. 288 304
[15]	Bhuyan H, Favre M, Henriquez A, Vogel G, Valderrama E, Wyndham E and Chuaqui H 2010 Surf. Coat. Tech. 204 2950
[16]	Wang Z P, Yousefi H R, Nishino Y, Ito H and Masugata K 2008 Phys. Lett. A 372 7179
[17]	Hosseinnejad M T, Ghoranneviss M, Etaati G R, Shirazi M and Ghorannevis Z 2011 Appl. Surf. Sci. 257 7653
[18]	Feugeas J N, Llonch E C, de González C O and Galambos G 1988 J. Appl. Phys. 64 2648
[19]	Kelly H, Lepone A, Marquez A, Lamas D and Oviedo C 1996 Plasma Sources Science and Technology 5 704
[20]	Umar Z A, Rawat R S, Ahmad R, Kumar A K, Wang Y, Hussain T, Chen Z, Shen L and Zhang Z 2014 Chin. Phys. B 23 025204
[21]	Umar Z A, Ahmad R, Rawat R S, Hussnain A, Khalid N, Chen Z, Shen L, Zhang Z and Hussain T 2014 J. Fusion Energy 33 640
[22]	Rawat R S, Arun P, Vedeshwar A G, Lee P and Lee S 2004 J. Appl. Phys. 95 7725
[23]	Kies W, Decker G, Berntien U, Sidelnikov Y V, Glushkov D A, Koshelev K N, Simanovskii D M and Bobashev S V 2000 Plasma Sources Science and Technology 9 279
[24]	Rawat R S 2012 Nanoscience and Nanotechnology Letters 4 251
[25]	Umar Z A, Rawat R S, Tan K S, Kumar A K, Ahmad R, Hussain T, Kloc C, Chen Z, Shen L and Zhang Z 2013 Nuclear Instruments and Methods in Physics Research Section B 301 53
[26]	Rawat R S, Lee P, White T, Ying L and Lee S 2001 Surface and Coatings Technology 138 159
[27]	Meskinis S, Andrulevicius M, Kopustinskas V and Tamulevicius S 2005 Appl. Surf. Sci. 249 295
[28]	Lee D Y, Kim Y H, Kim I K and Baik H K 1999 Thin Solid Film. 355 239
[29]	Yamamoto K, Koga Y and Fujiwara S 2001 Jpn J. Appl. Phys. 40 123
[30]	Takadoum J, Rauch J Y, Cattenot J M and Martin N 2003 Surf. Coat. Tech. 174 427

Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device

Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 30

相关文章 15

Metrics

本文评价

推荐阅读 0

[1]	Zein K. Heiba, Mohamed Bakr Mohamed, Ali A. Alkathiri, Sameh I. Ahmed, A A Alhazime. Impact of composition ratio on the structure and optical properties of (1-x)MnFe₂O₄/(x)ZnMn₂O₄ nanocomposite[J]. 中国物理B, 2022, 31(7): 77102-077102.
[2]	Chun-Mei Li(李春梅), Shun-Jie Yang(杨顺杰), and Jin-Ping Zhou(周金萍). Alloying and magnetic disordering effects on phase stability of Co₂ YGa (Y=Cr, V, and Ni) alloys: A first-principles study[J]. 中国物理B, 2022, 31(5): 56105-056105.
[3]	Jia-Li Chen(陈佳丽), Pei-Yu Ji(季佩宇), Cheng-Gang Jin(金成刚), Lan-Jian Zhuge(诸葛兰剑), and Xue-Mei Wu(吴雪梅). Synthesis of SiC/graphene nanosheet composites by helicon wave plasma[J]. 中国物理B, 2021, 30(7): 75201-075201.
[4]	饶畅, 费泽元, 陈伟驱, 陈梓敏, 卢星, 王钢, 王新中, 梁军, 裴艳丽. Band alignment of p-type oxide/ε-Ga₂O₃ heterojunctions investigated by x-ray photoelectron spectroscopy[J]. 中国物理B, 2020, 29(9): 97303-097303.
[5]	孙宗利, 康艳霜, 康艳梅. Confinement-induced modulation of elastic properties of nano-confined fluids in slit pore[J]. 中国物理B, 2019, 28(3): 36102-036102.
[6]	王昊, 高宁, 吕广宏, 姚仲文. Effects of temperature and point defects on the stability of C15 Laves phase in iron: A molecular dynamics investigation[J]. 中国物理B, 2018, 27(6): 66104-066104.
[7]	胡静, 宋秀能, 王胜雨, 林娟, 张俊荣, 马勇. Landscape of s-triazine molecule on Si(100) by a theoretical x-ray photoelectron spectroscopy and x-ray absorption near-edge structure spectra study[J]. 中国物理B, 2018, 27(11): 113101-113101.
[8]	孔祥刚, 袁志红, 虞游, 高涛, 马生贵. Elastic, vibrational, and thermodynamic properties of Sr₁₀(PO₄)₆F₂and Ca₁₀(PO₄)₆F₂ from first principles[J]. 中国物理B, 2017, 26(8): 86301-086301.
[9]	高明, 杜汇伟, 杨洁, 赵磊, 徐静, 马忠权. Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiO_x/Si system[J]. 中国物理B, 2017, 26(4): 45201-045201.
[10]	赵治乾, 张静, 王晓磊, 魏淑华, 赵超, 王文武. Angle-resolved x-ray photoelectron spectroscopy study of GeO_x growth by plasma post-oxidation[J]. 中国物理B, 2017, 26(10): 108201-108201.
[11]	彭英姿, 宋扬, 解晓强, 李源, 钱正洪, 白茹. Characterization of atomic-layer MoS₂ synthesized using a hot filament chemical vapor deposition method[J]. 中国物理B, 2016, 25(5): 58104-058104.
[12]	梁晨亮, 刘卫丽, 李沙沙, 孔慧, 张泽芳, 宋志棠. A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing[J]. 中国物理B, 2016, 25(5): 58301-058301.
[13]	黄梦礼, 王崇愚. First-principles studies of effects of interstitial boron and carbon on the structural, elastic, and electronic properties of Ni solution and Ni₃Al intermetallics[J]. 中国物理B, 2016, 25(10): 107104-107104.
[14]	王涛, 于贺, 董翔, 蒋亚东, 胡锐麟. Modeling and experiments of N-doped vanadium oxide prepared by a reactive sputtering process[J]. 中国物理B, 2015, 24(3): 38102-038102.
[15]	刘静, 王嘉鸥, 伊福廷, 吴蕊, 张念, 奎热西. Photoelectric characteristics of silicon P-N junction with nanopillar texture：Analysis of X-ray photoelectron spectroscopy[J]. , 2014, 23(9): 96101-096101.