Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device
Z A Umar, R Ahmad, R S Rawat, M A Baig, J Siddiqui, T Hussain
Structural and mechanical properties of Al-C-N films deposited at room temperature by plasma focus device
Z A Umar, R Ahmad, R S Rawat, M A Baig, J Siddiqui, T Hussain
中国物理B
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2016, (7): 75201
-075201
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DOI: 10.1088/1674-1056/25/7/075201