中国物理B ›› 2011, Vol. 20 ›› Issue (11): 116802-116802.doi: 10.1088/1674-1056/20/11/116802

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Dynamic scaling and optical properties of Zn(S, O, OH) thin film grown by chemical bath deposition

张毅1, 李博研1, 党向瑜1, 金晶1, 李凤岩1, 敖建平1, 孙云1, 武莉2   

  1. (1)Institute of Photoelectronic Thin Film Devices and Technology, Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology, and Key Laboratory of Optoelectronic Information Science & Technology of Ministry of Education, Nankai University,; (2)Institute of Physics, Nankai University, Tianjin 300071, China
  • 收稿日期:2011-01-04 修回日期:2011-07-14 出版日期:2011-11-15 发布日期:2011-11-15
  • 基金资助:
    Project supported by the National High Technology Research and Development Program of China (Grant No. 2004AA513020), the National Basic Research Program of China (Grant No. 2010CB933803), and the National Natural Science Foundation of China (Grant Nos. 60906033, 50902074, and 90922037).

Dynamic scaling and optical properties of Zn(S, O, OH) thin film grown by chemical bath deposition

Zhang Yi(张毅)a)†, Li Bo-Yan(李博研)a), Dang Xiang-Yu(党向瑜)a), Wu Li(武莉)b), Jin Jing(金晶)a), Li Feng-Yan(李凤岩)a), Ao Jian-Ping(敖建平)a), and Sun Yun(孙云)a)   

  1. a Institute of Photoelectronic Thin Film Devices and Technology, Tianjin Key Laboratory for Photoelectronic Thin Film Devices and Technology, and Key Laboratory of Optoelectronic Information Science & Technology of Ministry of Education, Nankai University, Tianjin 300071, China; b Institute of Physics, Nankai University, Tianjin 300071, China
  • Received:2011-01-04 Revised:2011-07-14 Online:2011-11-15 Published:2011-11-15
  • Supported by:
    Project supported by the National High Technology Research and Development Program of China (Grant No. 2004AA513020), the National Basic Research Program of China (Grant No. 2010CB933803), and the National Natural Science Foundation of China (Grant Nos. 60906033, 50902074, and 90922037).

摘要: The scaling behavior and optical properties of Zn(S, O and OH) thin films deposited on soda-lime glass substrates by chemical bath deposition method were studied by combined roughness measurements, scanning electron microscopy and optical properties measurement. From the scaling behaviour, the value of growth scaling exponent β , 0.38±0.06, was determined. This value indicated that the Zn(S, O, OH) film growth in the heterogeneous process was influenced by the surface diffusion and shadowing effect. Results of the optical properties measurements disclosed that the transmittance of the film was in the region of 70%-88% and the optical properties of the film grown for 40 min were better than those grown under other conditions. The energy band gap of the film deposited with 40 min was around 3.63 eV.

关键词: roughness, growth behaviour, Zn(S, O, OH), optical properties

Abstract: The scaling behavior and optical properties of Zn(S, O and OH) thin films deposited on soda-lime glass substrates by chemical bath deposition method were studied by combined roughness measurements, scanning electron microscopy and optical properties measurement. From the scaling behaviour, the value of growth scaling exponent β , 0.38±0.06, was determined. This value indicated that the Zn(S, O, OH) film growth in the heterogeneous process was influenced by the surface diffusion and shadowing effect. Results of the optical properties measurements disclosed that the transmittance of the film was in the region of 70%-88% and the optical properties of the film grown for 40 min were better than those grown under other conditions. The energy band gap of the film deposited with 40 min was around 3.63 eV.

Key words: roughness, growth behaviour, Zn(S, O, OH), optical properties

中图分类号:  (Nucleation and growth)

  • 68.55.A-
78.20.-e (Optical properties of bulk materials and thin films) 81.15.Aa (Theory and models of film growth) 81.15.Lm (Liquid phase epitaxy; deposition from liquid phases (melts, solutions, And surface layers on liquids))