中国物理B ›› 2011, Vol. 20 ›› Issue (10): 108801-108801.doi: 10.1088/1674-1056/20/10/108801

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Micromorph tandem solar cells: optimization of the microcrystalline silicon bottom cell in a single chamber system

张晓丹, 郑新霞, 许盛之, 林泉, 魏长春, 孙建, 耿新华, 赵颖   

  1. Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Tianjin 300071, China
  • 收稿日期:2010-09-21 修回日期:2011-05-06 出版日期:2011-10-15 发布日期:2011-10-15
  • 基金资助:
    Project supported by the Hi-Tech Research and Development Program of China (Grant Nos. 2007AA05Z436 and 2009AA050602), the Science and Technology Support Project of Tianjin (Grant No. 08ZCKFGX03500), the National Natural Science Foundation of China (Grant No. 60976051), the International Cooperation Project between China–Greece Government (Grant No. 2009DFA62580), and the Program for New Century Excellent Talents in University of China (NCET-08-0295).

Micromorph tandem solar cells: optimization of the microcrystalline silicon bottom cell in a single chamber system

Zhang Xiao-Dan(张晓丹)†, Zheng Xin-Xia(郑新霞), Xu Sheng-Zhi(许盛之), Lin Quan(林泉), Wei Chang-Chun(魏长春), Sun Jian(孙建), Geng Xin-Hua(耿新华), and Zhao Ying(赵颖)   

  1. Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Tianjin 300071, China
  • Received:2010-09-21 Revised:2011-05-06 Online:2011-10-15 Published:2011-10-15
  • Supported by:
    Project supported by the Hi-Tech Research and Development Program of China (Grant Nos. 2007AA05Z436 and 2009AA050602), the Science and Technology Support Project of Tianjin (Grant No. 08ZCKFGX03500), the National Natural Science Foundation of China (Grant No. 60976051), the International Cooperation Project between China–Greece Government (Grant No. 2009DFA62580), and the Program for New Century Excellent Talents in University of China (NCET-08-0295).

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摘要： We report on the development of single chamber deposition of microcrystalline and micromorph tandem solar cells directly onto low-cost glass substrates. The cells have pin single-junction or pin/pin double-junction structures on glass substrates coated with a transparent conductive oxide layer such as SnO2 or ZnO. By controlling boron and phosphorus contaminations, a single-junction microcrystalline silicon cell with a conversion efficiency of 7.47% is achieved with an i-layer thickness of 1.2 μm. In tandem devices, by thickness optimization of the microcrystalline silicon bottom solar cell, we obtained an initial conversion efficiency of 9.91% with an aluminum (Al) back reflector without a dielectric layer. In order to enhance the performance of the tandem solar cells, an improved light trapping structure with a ZnO/Al back reflector is used. As a result, a tandem solar cell with 11.04% of initial conversion efficiency has been obtained.

Abstract: We report on the development of single chamber deposition of microcrystalline and micromorph tandem solar cells directly onto low-cost glass substrates. The cells have pin single-junction or pin/pin double-junction structures on glass substrates coated with a transparent conductive oxide layer such as SnO2 or ZnO. By controlling boron and phosphorus contaminations, a single-junction microcrystalline silicon cell with a conversion efficiency of 7.47% is achieved with an i-layer thickness of 1.2 μm. In tandem devices, by thickness optimization of the microcrystalline silicon bottom solar cell, we obtained an initial conversion efficiency of 9.91% with an aluminum (Al) back reflector without a dielectric layer. In order to enhance the performance of the tandem solar cells, an improved light trapping structure with a ZnO/Al back reflector is used. As a result, a tandem solar cell with 11.04% of initial conversion efficiency has been obtained.

Key words: amorphous and microcrystalline silicon, single chamber, solar cells

中图分类号:  (Solar cells (photovoltaics))

  • 88.40.H-
88.40.jp (Multijunction solar cells) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))