High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

doi:10.1088/1674-1056/19/1/014219

中国物理B ›› 2010, Vol. 19 ›› Issue (1): 14219-014219.doi: 10.1088/1674-1056/19/1/014219

High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

韩伟华¹, 樊中朝¹, 朱宇², 徐学俊², 李智勇², 周亮², 俞育德², 余金中²

(1)Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (2)State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

收稿日期:2008-12-06 修回日期:2009-06-04 出版日期:2010-01-15 发布日期:2010-01-15
基金资助:
Project supported in part by the National Natural Science Foundation of China (Grant Nos. 60537010 and 60877036), the National Basic Research Program of China (Grant No. 2006CB302803) and the Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (ISCAS) (Grant No. ISCAS2008T10).

High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

Zhu Yu(朱宇)^a), Xu Xue-Jun(徐学俊)^a), Li Zhi-Yong(李智勇)^a), Zhou Liang(周亮)^a), Han Wei-Hua(韩伟华)^b),Fan Zhong-Chao(樊中朝)^b),Yu Yu-De(俞育德)^a), and Yu Jin-Zhong(余金中)^a)^†

^a State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; ^b Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received:2008-12-06 Revised:2009-06-04 Online:2010-01-15 Published:2010-01-15
Supported by:
Project supported in part by the National Natural Science Foundation of China (Grant Nos. 60537010 and 60877036), the National Basic Research Program of China (Grant No. 2006CB302803) and the Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (ISCAS) (Grant No. ISCAS2008T10).

摘要/Abstract

摘要： A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46\% and 25\% at a wavelength of 1.55~μ m are achieved by simulation and experiment, respectively. An optical 3~dB bandwidth of 45~nm from 1530~nm to 1575~nm is also obtained in experiment. Numerical calculation shows that a tolerance to fabrication error of 10~nm in etch depth is achievable. The measurement results indicate that the alignment error of ±2~μ m results in less than 1~dB additional coupling loss.

Abstract: A high efficiency and broad bandwidth grating coupler between a silicon-on-insulator (SOI) nanophotonic waveguide and fibre is designed and fabricated. Coupling efficiencies of 46% and 25% at a wavelength of 1.55 μm are achieved by simulation and experiment, respectively. An optical 3 dB bandwidth of 45 nm from 1530 nm to 1575 nm is also obtained in experiment. Numerical calculation shows that a tolerance to fabrication error of 10 nm in etch depth is achievable. The measurement results indicate that the alignment error of ±2 μm results in less than 1 dB additional coupling loss.

Key words: grating coupler, silicon-on-insulator, coupling efficiency, bandwidth

中图分类号: (Waveguides, couplers, and arrays)

42.82.Et

42.79.Dj (Gratings) 42.79.Gn (Optical waveguides and couplers) 42.81.Bm (Fabrication, cladding, and splicing) 42.81.Qb (Fiber waveguides, couplers, and arrays)

朱宇, 徐学俊, 李智勇, 周亮, 韩伟华, 樊中朝, 俞育德, 余金中. High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre[J]. 中国物理B, 2010, 19(1): 14219-014219.

Zhu Yu(朱宇), Xu Xue-Jun(徐学俊), Li Zhi-Yong(李智勇), Zhou Liang(周亮), Han Wei-Hua(韩伟华),Fan Zhong-Chao(樊中朝),Yu Yu-De(俞育德), and Yu Jin-Zhong(余金中) . High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre[J]. Chin. Phys. B, 2010, 19(1): 14219-014219.

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High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

High efficiency and broad bandwidth grating coupler between nanophotonic waveguide and fibre

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