中国物理B ›› 2013, Vol. 22 ›› Issue (6): 68504-068504.doi: 10.1088/1674-1056/22/6/068504

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Residual gas properties in field emission device with ZnO emitters

王金婵   

  1. School of Electronic and Information Engineering, Henan University of Science and Technology, Luoyang 471003, China
  • 收稿日期:2012-10-23 修回日期:2013-01-04 出版日期:2013-05-01 发布日期:2013-05-01
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 60904023).

Residual gas properties in field emission device with ZnO emitters

Wang Jin-Chan (王金婵)   

  1. School of Electronic and Information Engineering, Henan University of Science and Technology, Luoyang 471003, China
  • Received:2012-10-23 Revised:2013-01-04 Online:2013-05-01 Published:2013-05-01
  • Contact: Wang Jin-Chan E-mail:Wang4712279@163.com
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 60904023).

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摘要： In this paper, a vacuum system is employed to compare the emission stabilities of the same ZnO cathode in a sealed field emission (FE) device and under ultrahigh vacuum (UHV) condition. It is observed that the emission current is more stable under the UHV level than that in the device. When all conditions except the ambient gases are kept unchanged, the emission current degradation is mainly caused by the residual gases in the sealed device. The quadrupole mass spectrometer (QMS) equipped on the vacuum system is used to investigate the residual gas components. Based on the QMS data obtained, the following conclusions can be drawn: the residual gases in ZnO-FE-devices are H2, CH4, CO, Ar, and CO2. These residual gases can change the work function at the surface through adsorption or ion bombardment, thereby degrading the emission current of the cathode.

关键词: residual gas, ZnO, field emission, degradation, vacuum

Abstract: In this paper, a vacuum system is employed to compare the emission stabilities of the same ZnO cathode in a sealed field emission (FE) device and under ultrahigh vacuum (UHV) condition. It is observed that the emission current is more stable under the UHV level than that in the device. When all conditions except the ambient gases are kept unchanged, the emission current degradation is mainly caused by the residual gases in the sealed device. The quadrupole mass spectrometer (QMS) equipped on the vacuum system is used to investigate the residual gas components. Based on the QMS data obtained, the following conclusions can be drawn: the residual gases in ZnO-FE-devices are H2, CH4, CO, Ar, and CO2. These residual gases can change the work function at the surface through adsorption or ion bombardment, thereby degrading the emission current of the cathode.

Key words: residual gas, ZnO, field emission, degradation, vacuum

中图分类号: 

  • 85.45.-Db
85.45.-w (Vacuum microelectronics)