中国物理B ›› 2023, Vol. 32 ›› Issue (2): 28501-028501.doi: 10.1088/1674-1056/ac7f94

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Transition-edge sensors using Mo/Au/Au tri-layer films

Hubing Wang(王沪兵)1,2,3, Yue Lv(吕越)1,2,3, Dongxue Li(李冬雪)1,2, Yue Zhao(赵越)1,2,3, Bo Gao(高波)1,2,3,†, and Zhen Wang(王镇)1,2,3   

  1. 1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
    2 CAS Center for Excellence in Superconducting Electronics(CENSE), Shanghai 200050, China;
    3 University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2022-05-03 修回日期:2022-06-24 接受日期:2022-07-08 出版日期:2023-01-10 发布日期:2023-01-10
  • 通讯作者: Bo Gao E-mail:bo_f_gao@mail.sim.ac.cn
  • 基金资助:
    Project was supported by the National Key Research and Development Program of China (Grant No. 2017YFA0304000), the Shanghai Municipal Science and Technology Major Project (Grant No. 2017SHZDZX02), China National Space Administration (CNSA) (Grant No. D050104), and the grant for low energy gamma-ray detection research based on SQUID technique.

Transition-edge sensors using Mo/Au/Au tri-layer films

Hubing Wang(王沪兵)1,2,3, Yue Lv(吕越)1,2,3, Dongxue Li(李冬雪)1,2, Yue Zhao(赵越)1,2,3, Bo Gao(高波)1,2,3,†, and Zhen Wang(王镇)1,2,3   

  1. 1 State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
    2 CAS Center for Excellence in Superconducting Electronics(CENSE), Shanghai 200050, China;
    3 University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2022-05-03 Revised:2022-06-24 Accepted:2022-07-08 Online:2023-01-10 Published:2023-01-10
  • Contact: Bo Gao E-mail:bo_f_gao@mail.sim.ac.cn
  • Supported by:
    Project was supported by the National Key Research and Development Program of China (Grant No. 2017YFA0304000), the Shanghai Municipal Science and Technology Major Project (Grant No. 2017SHZDZX02), China National Space Administration (CNSA) (Grant No. D050104), and the grant for low energy gamma-ray detection research based on SQUID technique.

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摘要： The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transition-edge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a 55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.

关键词: transition-edge sensors, proximity effect, electroplating

Abstract: The proximity effect to reduce the transition temperature of a superconducting film is frequently used in transition-edge sensors. Here, we develop these transition-edge sensors using Mo/Au/Au tri-layer films to detect soft x-rays. They are equipped with an overhanging photon absorber. We reduce the fabrication complexity by integrating the sensor patterning with the tri-layer film formation. We determine the electro-thermal parameters of the sensors through a series of resistance vs. temperature and current vs. voltage measurements. We also demonstrate their energy-resolving capability by using a 55Fe radioactive x-ray source. The best energy resolution was approximately 6.66 eV at 5.9 keV, with a theoretical count rate of 500 Hz.

Key words: transition-edge sensors, proximity effect, electroplating

中图分类号:  (Superconducting optical, X-ray, and γ-ray detectors (SIS, NIS, transition edge))

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