Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

doi:10.1088/1674-1056/abeb0d

中国物理B ›› 2021, Vol. 30 ›› Issue (9): 95203-095203.doi: 10.1088/1674-1056/abeb0d

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

Wen-Chong Ouyang(欧阳文冲), Qi Liu(刘琦), Tao Jin(金涛), and Zheng-Wei Wu(吴征威)^†

School of Nuclear Science and Technology, University of Science and Technology of China, Hefei 230026, China

收稿日期:2020-12-01 修回日期:2021-01-14 接受日期:2021-03-02 出版日期:2021-08-19 发布日期:2021-08-24
通讯作者: Zheng-Wei Wu E-mail:wuzw@ustc.edu.cn
基金资助:
Project supported by the Key Research and Development Plan of Anhui Province, China (Grant No. 201904a07020013).

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

Wen-Chong Ouyang(欧阳文冲), Qi Liu(刘琦), Tao Jin(金涛), and Zheng-Wei Wu(吴征威)^†

School of Nuclear Science and Technology, University of Science and Technology of China, Hefei 230026, China

Received:2020-12-01 Revised:2021-01-14 Accepted:2021-03-02 Online:2021-08-19 Published:2021-08-24
Contact: Zheng-Wei Wu E-mail:wuzw@ustc.edu.cn
Supported by:
Project supported by the Key Research and Development Plan of Anhui Province, China (Grant No. 201904a07020013).

摘要/Abstract

摘要： A one-dimensional self-consistent calculation model of capacitively coupled plasma (CCP) discharge and electromagnetic wave propagation is developed to solve the plasma characteristics and electromagnetic wave transmission attenuation. Numerical simulation results show that the peak electron number density of argon is about 12 times higher than that of helium, and that the electron number density increases with the augment of pressure, radio frequency (RF) power, and RF frequency. However, the electron number density first increases and then decreases as the discharge gap increases. The transmission attenuation of electromagnetic wave in argon discharge plasma is 8.5-dB higher than that of helium. At the same time, the transmission attenuation increases with the augment of the RF power and RF frequency, but it does not increase or decrease monotonically with the increase of gas pressure and discharge gap. The electromagnetic wave absorption frequency band of the argon discharge plasma under the optimal parameters in this paper can reach the Ku band. It is concluded that the argon CCP discharge under the optimal discharge parameters has great potential applications in plasma stealth.

关键词: capacitively coupled plasma, electron number density, absorption frequency, plasma stealth

Abstract: A one-dimensional self-consistent calculation model of capacitively coupled plasma (CCP) discharge and electromagnetic wave propagation is developed to solve the plasma characteristics and electromagnetic wave transmission attenuation. Numerical simulation results show that the peak electron number density of argon is about 12 times higher than that of helium, and that the electron number density increases with the augment of pressure, radio frequency (RF) power, and RF frequency. However, the electron number density first increases and then decreases as the discharge gap increases. The transmission attenuation of electromagnetic wave in argon discharge plasma is 8.5-dB higher than that of helium. At the same time, the transmission attenuation increases with the augment of the RF power and RF frequency, but it does not increase or decrease monotonically with the increase of gas pressure and discharge gap. The electromagnetic wave absorption frequency band of the argon discharge plasma under the optimal parameters in this paper can reach the Ku band. It is concluded that the argon CCP discharge under the optimal discharge parameters has great potential applications in plasma stealth.

Key words: capacitively coupled plasma, electron number density, absorption frequency, plasma stealth

中图分类号: (Plasma heating by radio-frequency fields; ICR, ICP, helicons)

52.50.Qt

52.65.-y (Plasma simulation) 41.20.Jb (Electromagnetic wave propagation; radiowave propagation)

Wen-Chong Ouyang(欧阳文冲), Qi Liu(刘琦), Tao Jin(金涛), and Zheng-Wei Wu(吴征威). Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma[J]. 中国物理B, 2021, 30(9): 95203-095203.

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Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

Plasma characteristics and broadband electromagnetic wave absorption in argon and helium capacitively coupled plasma

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