Driving frequency effects on the mode transition in capacitively coupled argon discharges

doi:10.1088/1674-1056/20/6/065205

中国物理B ›› 2011, Vol. 20 ›› Issue (6): 65205-065205.doi: 10.1088/1674-1056/20/6/065205

Driving frequency effects on the mode transition in capacitively coupled argon discharges

刘相梅, 宋远红, 王友年

School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

收稿日期:2010-11-30 修回日期:2011-01-30 出版日期:2011-06-15 发布日期:2011-06-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 10775025), the Scientiˉc Research Fund of Liaoning Provincial Education Department for Colleges and Universities (Grant No. 2008T229), and the Program for New Century Excellent Talents in University (Grant No. NCET-08-0073).

Driving frequency effects on the mode transition in capacitively coupled argon discharges

Liu Xiang-Mei(刘相梅), Song Yuan-Hong(宋远红)^†, and Wang You-Nian(王友年)

School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

Received:2010-11-30 Revised:2011-01-30 Online:2011-06-15 Published:2011-06-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 10775025), the Scientiˉc Research Fund of Liaoning Provincial Education Department for Colleges and Universities (Grant No. 2008T229), and the Program for New Century Excellent Talents in University (Grant No. NCET-08-0073).

摘要/Abstract

摘要： A one-dimensional fluid model is employed to investigate the discharge sustaining mechanisms in the capacitively coupled argon plasmas, by modulating the driving frequency in the range of 40 kHz-60 MHz. The model incorporates the density and flux balance of electron and ion, electron energy balance, as well as Poisson's equation. In our simulation, the discharge experiences mode transition as the driving frequency increases, from the γ regime in which the discharge is maintained by the secondary electrons emitted from the electrodes under ion bombardment, to the α regime in which sheath oscillation is responsible for most of the electron heating in the discharge sustaining. The electron density and electron temperature at the centre of the discharge, as well as the ion flux on the electrode are figured out as a function of the driving frequency, to confirm the two regimes and transition between them. The effects of gas pressure, secondary electron emission coefficient and applied voltage on the discharge are also discussed.

关键词: capacitively coupled plasma, mode transition, Ar discharge

Abstract: A one-dimensional fluid model is employed to investigate the discharge sustaining mechanisms in the capacitively coupled argon plasmas, by modulating the driving frequency in the range of 40 kHz-60 MHz. The model incorporates the density and flux balance of electron and ion, electron energy balance, as well as Poisson's equation. In our simulation, the discharge experiences mode transition as the driving frequency increases, from the $\gamma$ regime in which the discharge is maintained by the secondary electrons emitted from the electrodes under ion bombardment, to the $\alpha$ regime in which sheath oscillation is responsible for most of the electron heating in the discharge sustaining. The electron density and electron temperature at the centre of the discharge, as well as the ion flux on the electrode are figured out as a function of the driving frequency, to confirm the two regimes and transition between them. The effects of gas pressure, secondary electron emission coefficient and applied voltage on the discharge are also discussed.

Key words: capacitively coupled plasma, mode transition, Ar discharge

中图分类号: (Plasma simulation)

52.65.-y

52.25.-b (Plasma properties) 52.80.Pi (High-frequency and RF discharges)

刘相梅, 宋远红, 王友年. Driving frequency effects on the mode transition in capacitively coupled argon discharges[J]. 中国物理B, 2011, 20(6): 65205-065205.

Liu Xiang-Mei(刘相梅), Song Yuan-Hong(宋远红), and Wang You-Nian(王友年). Driving frequency effects on the mode transition in capacitively coupled argon discharges[J]. Chin. Phys. B, 2011, 20(6): 65205-065205.

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Driving frequency effects on the mode transition in capacitively coupled argon discharges

Driving frequency effects on the mode transition in capacitively coupled argon discharges

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