中国物理B ›› 2021, Vol. 30 ›› Issue (4): 47401-.doi: 10.1088/1674-1056/abd2a2

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  • 收稿日期:2020-08-17 修回日期:2020-12-07 接受日期:2020-12-11 出版日期:2021-03-16 发布日期:2021-04-02

Device physics and design of FD-SOI JLFET with step-gate-oxide structure to suppress GIDL effect

Bin Wang(王斌)1,†, Xin-Long Shi(史鑫龙)1, Yun-Feng Zhang(张云峰)1, Yi Chen(陈伊)1, 2, Hui-Yong Hu(胡辉勇)1, and Li-Ming Wang(王利明)1   

  1. 1 State Key Discipline Laboratory of Wide Bandgap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an 710071, China;  2 Mailbox 150, BaoJi 721000, China
  • Received:2020-08-17 Revised:2020-12-07 Accepted:2020-12-11 Online:2021-03-16 Published:2021-04-02
  • Contact: †Corresponding author. E-mail: wbin@xidian.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61704130) and the Fund from the Science and Technology on Analog Integrated Circuit Laboratory, China (Grant No. JCKY2019210C029).

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Abstract: A novel n-type junctionless field-effect transistor (JLFET) with a step-gate-oxide (SGO) structure is proposed to suppress the gate-induced drain leakage (GIDL) effect and off-state current I off. Introducing a 6-nm-thick tunnel-gate-oxide and maintaining 3-nm-thick control-gate-oxide, lateral band-to-band tunneling (L-BTBT) width is enlarged and its tunneling probability is reduced at the channel-drain surface, leading the off-state current Ioff to decrease finally. Also, the thicker tunnel-gate-oxide can reduce the influence on the total gate capacitance of JLFET, which could alleviate the capacitive load of the transistor in the circuit applications. Sentaurus simulation shows that Ioff of the new optimized JLFET reduced significantly with little impaction on its on-state current I on and threshold voltage V TH becoming less, thus showing an improved Ion/Ioff ratio (5×104) and subthreshold swing (84 mV/dec), compared with the scenario of the normal JLFET. The influence of the thickness and length of SGO structure on the performance of JLFET are discussed in detail, which could provide useful instruction for the device design.

Key words: junctionless field-effect transistor (FET), gate-induced drain leakage (GIDL), step-gate-oxide, off-state current

中图分类号:  (Tunneling phenomena: single particle tunneling and STM)

  • 74.55.+v
85.30.Tv (Field effect devices) 85.30.De (Semiconductor-device characterization, design, and modeling)