中国物理B ›› 2015, Vol. 24 ›› Issue (5): 57701-057701.doi: 10.1088/1674-1056/24/5/057701
• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇 下一篇
王文博a, 谷航a, 何兴理a, 轩伟鹏a, 陈金凯a, 汪小知a, 骆季奎a b
Wang Wen-Bo (王文博)a, Gu Hang (谷航)a, He Xing-Li (何兴理)a, Xuan Wei-Peng (轩伟鹏)a, Chen Jin-Kai (陈金凯)a, Wang Xiao-Zhi (汪小知)a, Luo Ji-Kui (骆季奎)a b
摘要: Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric (PE) ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.
中图分类号: (Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics)