中国物理B ›› 2020, Vol. 29 ›› Issue (6): 67504-067504.doi: 10.1088/1674-1056/ab8375

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Influence of the anisotropy on the magneto-acoustic response of magnetic surface acoustic wave resonators

Yawei Lu(鲁亚巍), Wenbin Hu(胡文彬), Wan Liu(刘婉), Feiming Bai(白飞明)   

  1. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology, Chengdu 610054, China
  • 收稿日期:2020-02-04 修回日期:2020-03-24 出版日期:2020-06-05 发布日期:2020-06-05
  • 通讯作者: Feiming Bai E-mail:fmbai@uestc.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 61871081) and the National Key Scientific Instrument and Equipment Development Project of China (Grant No. 51827802).

Influence of the anisotropy on the magneto-acoustic response of magnetic surface acoustic wave resonators

Yawei Lu(鲁亚巍), Wenbin Hu(胡文彬), Wan Liu(刘婉), Feiming Bai(白飞明)   

  1. State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology, Chengdu 610054, China
  • Received:2020-02-04 Revised:2020-03-24 Online:2020-06-05 Published:2020-06-05
  • Contact: Feiming Bai E-mail:fmbai@uestc.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 61871081) and the National Key Scientific Instrument and Equipment Development Project of China (Grant No. 51827802).

摘要: One-port magnetic surface acoustic wave (MSAW) resonators are fabricated by stacking multilayered (FeCoSiB/SiO2)n films directly on top of interdigital electrodes. It is shown that the magneto-acoustic response of the MSAW resonators critically depends the hysteresis of ΔE effect. For the magnetic multilayer without induced magnetic anisotropy, the resonance frequency (fR) exhibits a butterfly-like dependence on the external field, therefore, enabling bipolar detection of magnetic field smaller than its coercive field. However, for the magnetic multilayers with induced magnetic anisotropy, butterfly-like or loop-like fR-H curves are measured along the interdigtial electrode fingers or the SAW propagation direction, which can be attributed to the competition between the magnetic field-induced anisotropy and the stress-induced or shape anisotropy.

关键词: surface acoustic wave, magnetic field sensor, magnetoelastic property

Abstract: One-port magnetic surface acoustic wave (MSAW) resonators are fabricated by stacking multilayered (FeCoSiB/SiO2)n films directly on top of interdigital electrodes. It is shown that the magneto-acoustic response of the MSAW resonators critically depends the hysteresis of ΔE effect. For the magnetic multilayer without induced magnetic anisotropy, the resonance frequency (fR) exhibits a butterfly-like dependence on the external field, therefore, enabling bipolar detection of magnetic field smaller than its coercive field. However, for the magnetic multilayers with induced magnetic anisotropy, butterfly-like or loop-like fR-H curves are measured along the interdigtial electrode fingers or the SAW propagation direction, which can be attributed to the competition between the magnetic field-induced anisotropy and the stress-induced or shape anisotropy.

Key words: surface acoustic wave, magnetic field sensor, magnetoelastic property

中图分类号:  (Magnetic properties of interfaces (multilayers, superlattices, heterostructures))

  • 75.70.Cn
68.65.-k (Low-dimensional, mesoscopic, nanoscale and other related systems: structure and nonelectronic properties) 07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing) 77.65.Dq (Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics)