Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

doi:10.1088/1674-1056/24/5/057701

中国物理B ›› 2015, Vol. 24 ›› Issue (5): 57701-057701.doi: 10.1088/1674-1056/24/5/057701

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

王文博^a, 谷航^a, 何兴理^a, 轩伟鹏^a, 陈金凯^a, 汪小知^a, 骆季奎^{a b}

a Department of Information Science & Electronic Engineering, and Cyrus Tang Center for Sensor Materials and Applications, Zhejiang University, Hangzhou 310027, China;
b Institute of Renewable Energy & Environment Technology, University of Bolton, Deane Road, Bolton, BL3 5AB, United Kingdom

收稿日期:2014-11-03 修回日期:2014-12-24 出版日期:2015-05-05 发布日期:2015-05-05
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61274037 and 61301046) and the Research Fund for the Doctoral Program of Higher Education of China (Grant Nos. 20120101110031 and 20120101110054).

Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

Wang Wen-Bo (王文博)^a, Gu Hang (谷航)^a, He Xing-Li (何兴理)^a, Xuan Wei-Peng (轩伟鹏)^a, Chen Jin-Kai (陈金凯)^a, Wang Xiao-Zhi (汪小知)^a, Luo Ji-Kui (骆季奎)^{a b}

a Department of Information Science & Electronic Engineering, and Cyrus Tang Center for Sensor Materials and Applications, Zhejiang University, Hangzhou 310027, China;
b Institute of Renewable Energy & Environment Technology, University of Bolton, Deane Road, Bolton, BL3 5AB, United Kingdom

Received:2014-11-03 Revised:2014-12-24 Online:2015-05-05 Published:2015-05-05
Contact: ang Xiao-Zhi, Luo Ji-Kui E-mail:xw224@zju.edu.cn;Jackluo@zju.edu.cn
About author:77.65.Dq; 07.07.Df; 81.40.Ef
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61274037 and 61301046) and the Research Fund for the Doctoral Program of Higher Education of China (Grant Nos. 20120101110031 and 20120101110054).

摘要/Abstract

摘要： Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric (PE) ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.

关键词: surface acoustic wave, ultraviolet sensor, ZnO, thermal annealing

Abstract: Surface acoustic wave (SAW) resonators are a type of ultraviolet (UV) light sensors with high sensitivity, and they have been extensively studied. Transparent SAW devices are very useful and can be developed into various sensors and microfluidics for sensing/monitoring and lab-on-chip applications. We report the fabrication of high sensitivity SAW UV sensors based on piezoelectric (PE) ZnO thin films deposited on glass substrates. The sensors were fabricated and their performances against the post-deposition annealing condition were investigated. It was found that the UV-light sensitivity is improved by more than one order of magnitude after annealing. The frequency response increases significantly and the response becomes much faster. The optimized devices also show a small temperature coefficient of frequency and excellent repeatability and stability, demonstrating its potential for UV-light sensing application.

Key words: surface acoustic wave, ultraviolet sensor, ZnO, thermal annealing

中图分类号: (Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics)

77.65.Dq

07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing) 81.40.Ef (Cold working, work hardening; annealing, post-deformation annealing, quenching, tempering recovery, and crystallization)

王文博, 谷航, 何兴理, 轩伟鹏, 陈金凯, 汪小知, 骆季奎. Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors[J]. 中国物理B, 2015, 24(5): 57701-057701.

Wang Wen-Bo (王文博), Gu Hang (谷航), He Xing-Li (何兴理), Xuan Wei-Peng (轩伟鹏), Chen Jin-Kai (陈金凯), Wang Xiao-Zhi (汪小知), Luo Ji-Kui (骆季奎). Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors[J]. Chin. Phys. B, 2015, 24(5): 57701-057701.

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Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

Transparent ZnO/glass surface acoustic wave based high performance ultraviolet light sensors

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