中国物理B ›› 2012, Vol. 21 ›› Issue (6): 66101-066101.doi: 10.1088/1674-1056/21/6/066101
• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇 下一篇
赵孟珂a, 梁艳b, 郜小勇a, 陈超a, 陈先梅a, 赵显伟a
Zhao Meng-Ke(赵孟珂)a), Liang Yan(梁艳)b), Gao Xiao-Yong(郜小勇)a)†, Chen Chao(陈超)a), Chen Xian-Mei(陈先梅)a), and Zhao Xian-Wei(赵显伟)a)
摘要: Nitrogen doping of silver oxide (AgxO) film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios (FRs) of nitrogen to O2. Evolutions of the structure, the reflectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular reflectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.
中图分类号: (X-ray diffraction)