Influences of grain size and microstructure on optical properties of microcrystalline diamond films

doi:10.1088/1674-1056/ab593d

中国物理B ›› 2020, Vol. 29 ›› Issue (1): 18103-018103.doi: 10.1088/1674-1056/ab593d

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Influences of grain size and microstructure on optical properties of microcrystalline diamond films

Jia-Le Wang(王家乐), Cheng-Ke Chen(陈成克), Xiao Li(李晓), Mei-Yan Jiang(蒋梅燕), Xiao-Jun Hu(胡晓君)

College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China

收稿日期:2019-09-02 修回日期:2019-10-22 出版日期:2020-01-05 发布日期:2020-01-05
通讯作者: Xiao-Jun Hu E-mail:huxj@zjut.edu.cn
基金资助:
Project supported by the Key Project of the National Natural Science Foundation of China (Grant No. U1809210), the National Natural Science Foundation of China (Grant Nos. 50972129 and 50602039), the International Science Technology Cooperation Program of China (Grant No. 2014DFR51160), the National Key Research and Development Program of China (Grant No. 2016YFE0133200), the European Union's Horizon 2020 Research and Innovation Staff Exchange (RISE) Scheme (Grant No. 734578), the Belt and Road International Cooperation Project from Key Research and Development Program of Zhejiang Province, China (Grant No. 2018C04021), and the Natural Science Foundation of Zhejiang Province, China (Grant Nos. LQ15A040004 and LY18E020013).

Influences of grain size and microstructure on optical properties of microcrystalline diamond films

Jia-Le Wang(王家乐), Cheng-Ke Chen(陈成克), Xiao Li(李晓), Mei-Yan Jiang(蒋梅燕), Xiao-Jun Hu(胡晓君)

College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China

Received:2019-09-02 Revised:2019-10-22 Online:2020-01-05 Published:2020-01-05
Contact: Xiao-Jun Hu E-mail:huxj@zjut.edu.cn
Supported by:
Project supported by the Key Project of the National Natural Science Foundation of China (Grant No. U1809210), the National Natural Science Foundation of China (Grant Nos. 50972129 and 50602039), the International Science Technology Cooperation Program of China (Grant No. 2014DFR51160), the National Key Research and Development Program of China (Grant No. 2016YFE0133200), the European Union's Horizon 2020 Research and Innovation Staff Exchange (RISE) Scheme (Grant No. 734578), the Belt and Road International Cooperation Project from Key Research and Development Program of Zhejiang Province, China (Grant No. 2018C04021), and the Natural Science Foundation of Zhejiang Province, China (Grant Nos. LQ15A040004 and LY18E020013).

摘要/Abstract

摘要： Microcrystalline diamond (MCD) films with different grain sizes ranging from 160 nm to 2200 nm are prepared by using a hot filament chemical vapor deposition (HFCVD) system, and the influences of grain size and structural features on optical properties are investigated. The results show that the film with grain size in a range of 160 nm-310 nm exhibits a higher refractive index in a range of (2.77-2.92). With grain size increasing to 620±300 nm, the refractive index shows a value between 2.39 and 2.47, approaching to that of natural diamond (2.37-2.55), and a lower extinction coefficient value between 0.08 and 0.77. When the grain size increases to 2200 nm, the value of refractive index increases to a value between 2.66 and 2.81, and the extinction coefficient increases to a value in a range of 0.22-1.28. Visible Raman spectroscopy measurements show that all samples have distinct diamond peaks located in a range of 1331 cm^-1-1333 cm^-1, the content of diamond phase increases gradually as grain size increases, and the amount of trans-polyacetylene (TPA) content decreases. Meanwhile, the sp² carbon clusters content and its full-width-at-half-maximum (FWHM) value are significantly reduced in MCD film with a grain size of 620 nm, which is beneficial to the improvement of the optical properties of the films.

关键词: microcrystalline diamond films, grain size, microstructure, optical properties

Abstract: Microcrystalline diamond (MCD) films with different grain sizes ranging from 160 nm to 2200 nm are prepared by using a hot filament chemical vapor deposition (HFCVD) system, and the influences of grain size and structural features on optical properties are investigated. The results show that the film with grain size in a range of 160 nm-310 nm exhibits a higher refractive index in a range of (2.77-2.92). With grain size increasing to 620±300 nm, the refractive index shows a value between 2.39 and 2.47, approaching to that of natural diamond (2.37-2.55), and a lower extinction coefficient value between 0.08 and 0.77. When the grain size increases to 2200 nm, the value of refractive index increases to a value between 2.66 and 2.81, and the extinction coefficient increases to a value in a range of 0.22-1.28. Visible Raman spectroscopy measurements show that all samples have distinct diamond peaks located in a range of 1331 cm^-1-1333 cm^-1, the content of diamond phase increases gradually as grain size increases, and the amount of trans-polyacetylene (TPA) content decreases. Meanwhile, the sp² carbon clusters content and its full-width-at-half-maximum (FWHM) value are significantly reduced in MCD film with a grain size of 620 nm, which is beneficial to the improvement of the optical properties of the films.

Key words: microcrystalline diamond films, grain size, microstructure, optical properties

中图分类号: (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

81.15.Gh

82.45.Mp (Thin layers, films, monolayers, membranes) 82.75.Mj (Measurements and simulation of properties (optical, structural) of molecules in zeolites)

王家乐, 陈成克, 李晓, 蒋梅燕, 胡晓君. Influences of grain size and microstructure on optical properties of microcrystalline diamond films[J]. 中国物理B, 2020, 29(1): 18103-018103.

Jia-Le Wang(王家乐), Cheng-Ke Chen(陈成克), Xiao Li(李晓), Mei-Yan Jiang(蒋梅燕), Xiao-Jun Hu(胡晓君). Influences of grain size and microstructure on optical properties of microcrystalline diamond films[J]. Chin. Phys. B, 2020, 29(1): 18103-018103.

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Influences of grain size and microstructure on optical properties of microcrystalline diamond films

Influences of grain size and microstructure on optical properties of microcrystalline diamond films

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