中国物理B ›› 2012, Vol. 21 ›› Issue (6): 66101-066101.doi: 10.1088/1674-1056/21/6/066101

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

Evolution of the structural and optical properties of silver oxide films with different stoichiometries deposited by direct-current magnetron reactive sputtering

赵孟珂a, 梁艳b, 郜小勇a, 陈超a, 陈先梅a, 赵显伟a   

  1. a. Key Laboratory of Material Physics (Ministry of Education), School of Physics and Engineering,Zhengzhou University, Zhengzhou 450052, China;
    b. College of Information Science and Engineering, Henan University of Technology, Zhengzhou 450001, China
  • 收稿日期:2011-09-28 修回日期:2011-10-25 出版日期:2012-05-01 发布日期:2012-05-01
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the Foundation of Henan Educational Committee, China (Grant No. 2010A140017), the College Young Teachers Program of Henan Province and the Graduate Innovation Fund of Zhengzhou University (Grant No. 11L10102).

Evolution of the structural and optical properties of silver oxide films with different stoichiometries deposited by direct-current magnetron reactive sputtering

Zhao Meng-Ke(赵孟珂)a), Liang Yan(梁艳)b), Gao Xiao-Yong(郜小勇)a)†, Chen Chao(陈超)a), Chen Xian-Mei(陈先梅)a), and Zhao Xian-Wei(赵显伟)a)   

  1. a. Key Laboratory of Material Physics (Ministry of Education), School of Physics and Engineering,Zhengzhou University, Zhengzhou 450052, China;
    b. College of Information Science and Engineering, Henan University of Technology, Zhengzhou 450001, China
  • Received:2011-09-28 Revised:2011-10-25 Online:2012-05-01 Published:2012-05-01
  • Contact: Gao Xiao-Yong E-mail:xygao@zzu.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the Foundation of Henan Educational Committee, China (Grant No. 2010A140017), the College Young Teachers Program of Henan Province and the Graduate Innovation Fund of Zhengzhou University (Grant No. 11L10102).

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摘要： Nitrogen doping of silver oxide (AgxO) film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios (FRs) of nitrogen to O2. Evolutions of the structure, the reflectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular reflectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.

关键词: silver oxide film, nitrogen doping, optical properties, magnetron reactive sputtering

Abstract: Nitrogen doping of silver oxide (AgxO) film is necessary for its application in transparent conductive film and diodes because intrinsic AgxO film is a p-type semiconductor with poor conductivity. In this work, a series of AgxO films is deposited on glass substrates by direct-current magnetron reactive sputtering at different flow ratios (FRs) of nitrogen to O2. Evolutions of the structure, the reflectivity, and the transmissivity of the film are studied by X-ray diffractometry and sphectrophotometry, respectively. The specular transmissivity and the specular reflectivity of the film decreasing with FR increasing can be attributed to the evolution of the phase structure of the film. The nitrogen does not play the role of an acceptor dopant in the film deposition.

Key words: silver oxide film, nitrogen doping, optical properties, magnetron reactive sputtering

中图分类号:  (X-ray diffraction)

  • 61.05.cp
78.66.-w (Optical properties of specific thin films) 81.15.Cd (Deposition by sputtering)