Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer

doi:10.1088/1674-1056/19/1/014218

中国物理B ›› 2010, Vol. 19 ›› Issue (1): 14218-014218.doi: 10.1088/1674-1056/19/1/014218

Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer

朱腾飞, 谭炳辉, 潘雪丰, 陶卫东

College of Science, Ningbo University, Ningbo 315211, China

收稿日期:2009-05-30 修回日期:2009-07-03 出版日期:2010-01-15 发布日期:2010-01-15
基金资助:
Projiect supported by the National Key Basic Research Special Fund of China (Grant No. 2004CB719805) and the Ningbo Natural Science Foundation, China (Grant No. 2009A610011).

Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer

Zhu Teng-Fei(朱腾飞), Tan Bing-Hui(谭炳辉), Pan Xue-Feng(潘雪丰), and Tao Wei-Dong(陶卫东)^†

College of Science, Ningbo University, Ningbo 315211, China

Received:2009-05-30 Revised:2009-07-03 Online:2010-01-15 Published:2010-01-15
Supported by:
Projiect supported by the National Key Basic Research Special Fund of China (Grant No. 2004CB719805) and the Ningbo Natural Science Foundation, China (Grant No. 2009A610011).

摘要/Abstract

摘要： 2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo-polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm². The optical design, theoretical calculations and experimental results including diffraction patterns verifying the formation of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems (MEMS).

Abstract: 2D and 3D submicron periodic structures are first fabricated by red-induced photopolymerization using a common 635 nm semiconductor laser and specially developed red-sensitive polymer material. The principle of this new photo-polymer material fabrication is explained and the absorption spectra of the material are measured. This fabrication technique allows a deeper penetration into volume and larger interference irradiation area which is more than 1 cm². The optical design, theoretical calculations and experimental results including diffraction patterns verifying the formation of periodic structures are presented. Compared with other fabrication technologies using high-power lasers, this approach has greatly reduced the demand for laser apparatus. Therefore, it is much more accessible to most laboratories and potentially usable in holographic fabrication of photonic crystals and devices in micro electro-mechanical systems (MEMS).

Key words: submicron periodic-structures, holographic fabrication, red sensitive polymer, red-incuced polymerization

中图分类号: (Polymers and organics)

42.70.Jk

42.82.Cr (Fabrication techniques; lithography, pattern transfer) 81.05.Lg (Polymers and plastics; rubber; synthetic and natural fibers; organometallic and organic materials) 82.35.-x (Polymers: properties; reactions; polymerization) 82.50.-m (Photochemistry) 85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)

朱腾飞, 谭炳辉, 潘雪丰, 陶卫东. Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer[J]. 中国物理B, 2010, 19(1): 14218-014218.

Zhu Teng-Fei(朱腾飞), Tan Bing-Hui(谭炳辉), Pan Xue-Feng(潘雪丰), and Tao Wei-Dong(陶卫东). Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer[J]. Chin. Phys. B, 2010, 19(1): 14218-014218.

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Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635~nm laserand matched photopolymer

Fabrication of two- and three-dimensional periodic submicron structures by holographic lithography with a 635 nm laserand matched photopolymer

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