中国物理B ›› 2007, Vol. 16 ›› Issue (12): 3790-3797.doi: 10.1088/1009-1963/16/12/039

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Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition

路新春1, 雒建斌1, 张振宇2   

  1. (1)State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China; (2)State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
  • 出版日期:2007-12-20 发布日期:2007-12-20
  • 基金资助:
    Project supported by the National Key Basic Research Program of China (Grant No~2003CB716201), the Major Research Plan of the National Natural Science Foundation of China (Grant No~50390060), the National Natural Science Foundation of China (Grant No~5057

Tribological properties of diamond-like carbon films deposited by pulsed laser arc deposition

Zhang Zhen-Yu(张振宇)a)b)† , Lu Xin-Chun(路新春)a), and Luo Jian-Bin(雒建斌)a)   

  1. a State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China; b Key Laboratory for Precision and Non-Traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, China
  • Online:2007-12-20 Published:2007-12-20
  • Supported by:
    Project supported by the National Key Basic Research Program of China (Grant No~2003CB716201), the Major Research Plan of the National Natural Science Foundation of China (Grant No~50390060), the National Natural Science Foundation of China (Grant No~5057

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摘要： A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp$^{2}$, sp$^{3}$ and C--O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17--21~nm, 30--57~nm, 67--123~nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17--41~nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123~nm.

关键词: pulsed laser arc deposition, diamond-like carbon, tribological property, physical property

Abstract: A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp$^{2}$, sp$^{3}$ and C--O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17--21 nm, 30--57 nm, 67--123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17--41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.

Key words: pulsed laser arc deposition, diamond-like carbon, tribological property, physical property

中图分类号:  (Mechanical and acoustical properties)

  • 68.60.Bs
62.20.Qp (Friction, tribology, and hardness) 62.25.-g (Mechanical properties of nanoscale systems) 78.67.-n (Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures) 79.60.Dp (Adsorbed layers and thin films) 81.40.Pq (Friction, lubrication, and wear)