中国物理B ›› 2007, Vol. 16 ›› Issue (9): 2798-2802.doi: 10.1088/1009-1963/16/9/050

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Role of atomic transverse migration in growth of diamond-like carbon films

马天宝, 胡元中, 王慧   

  1. The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
  • 收稿日期:2006-11-09 修回日期:2007-01-09 出版日期:2007-09-20 发布日期:2007-09-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos~50390060 and 50675111) and the State Key Development Program for Basic Research of China (Grant No~2003CB716201).

Role of atomic transverse migration in growth of diamond-like carbon films

Ma Tian-Bao(马天宝)†, Hu Yuan-Zhong(胡元中), and Wang Hui(王慧)   

  1. The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
  • Received:2006-11-09 Revised:2007-01-09 Online:2007-09-20 Published:2007-09-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos~50390060 and 50675111) and the State Key Development Program for Basic Research of China (Grant No~2003CB716201).

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摘要： The growth of diamond-like carbon (DLC) films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.

Abstract: The growth of diamond-like carbon (DLC) films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.

Key words: diamond-like carbon, molecular dynamics

中图分类号:  (Nucleation and growth)

  • 68.55.A-
68.35.B- (Structure of clean surfaces (and surface reconstruction)) 68.55.-a (Thin film structure and morphology)