中国物理B ›› 2007, Vol. 16 ›› Issue (9): 2798-2802.doi: 10.1088/1009-1963/16/9/050
• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇 下一篇
马天宝, 胡元中, 王慧
Ma Tian-Bao(马天宝)†, Hu Yuan-Zhong(胡元中), and Wang Hui(王慧)
摘要: The growth of diamond-like carbon (DLC) films is studied using molecular dynamics simulations. The effect of impact angle on film structure is carefully studied, which shows that the transverse migration of the incident atoms is the main channel of film relaxation. A transverse-migration-induced film relaxation model is presented to elucidate the process of film relaxation which advances the original model of subplantation. The process of DLC film growth on a rough surface is also investigated, as well as the evolution of microstructure and surface morphology of the film. A preferential-to-homogeneous growth mode and a smoothing of the film are observed, which are due to the transverse migration of the incident atoms.
中图分类号: (Nucleation and growth)