中国物理B ›› 2004, Vol. 13 ›› Issue (11): 1887-1891.doi: 10.1088/1009-1963/13/11/021

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Study of refractive index and thickness of TiO2/ormosil planar waveguide

王宝玲, 胡丽丽   

  1. Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 收稿日期:2003-12-29 修回日期:2004-04-12 出版日期:2004-11-20 发布日期:2005-06-20

Study of refractive index and thickness of TiO2/ormosil planar waveguide

Wang Bao-Ling (王宝玲), Hu Li-Li (胡丽丽)   

  1. Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • Received:2003-12-29 Revised:2004-04-12 Online:2004-11-20 Published:2005-06-20

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摘要： Hybrid titania/ormosil waveguide films have been prepared by sol-gel method at low thermal treatment temperature of 150℃. The influence of processing parameters including the molar ratios of Ti(OBu)_{4}/glycidoxypropyltrimethoxysilane (GLYMO) and H_{2}O/Ti(OBu)_{4} (expressed as R), especially aging of sol, on the refractive index and thickness of film was investigated. The optical properties of films were measured with Scanning Electron Microscope and m-line spectroscopy. The results indicate that the film thickness increases with the aging time of sol, but the variation of refractive index as a function of aging time of sol depends on the relative ratio of GLYMO to Ti-alkoxide. The relation between film thickness and corresponding sol viscosity is linear as the volume of GLYMO is 80% within the range of measured data.

关键词: sol-gel process, aging, optical property, TiO_2/ormosil planar waveguide

Abstract: Hybrid titania/ormosil waveguide films have been prepared by sol-gel method at low thermal treatment temperature of 150℃. The influence of processing parameters including the molar ratios of Ti(OBu)$_{4}$/glycidoxypropyltrimethoxysilane (GLYMO) and H$_{2}$O/Ti(OBu)$_{4}$ (expressed as $R$), especially aging of sol, on the refractive index and thickness of film was investigated. The optical properties of films were measured with Scanning Electron Microscope and m-line spectroscopy. The results indicate that the film thickness increases with the aging time of sol, but the variation of refractive index as a function of aging time of sol depends on the relative ratio of GLYMO to Ti-alkoxide. The relation between film thickness and corresponding sol viscosity is linear as the volume of GLYMO is 80% within the range of measured data.

Key words: sol-gel process, aging, optical property, TiO$_2$/ormosil planar waveguide

中图分类号:  (Sol-gel processing, precipitation)

  • 81.20.Fw
78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)) 68.37.Hk (Scanning electron microscopy (SEM) (including EBIC)) 78.66.Sq (Composite materials) 81.40.Cd (Solid solution hardening, precipitation hardening, and dispersion hardening; aging) 42.79.Gn (Optical waveguides and couplers)