Fabrication of two-dimensional van der Waals moiré superlattices

doi:10.1088/1674-1056/adb38b

中国物理B ›› 2025, Vol. 34 ›› Issue (4): 47302-047302.doi: 10.1088/1674-1056/adb38b

所属专题： TOPICAL REVIEW — Moiré physics in two-dimensional materials

Fabrication of two-dimensional van der Waals moiré superlattices

Zihao Wan(万子豪), Chao Wang(王超), Hang Zheng(郑航), Wenna Tang(唐文娜), Zihao Fu(付梓豪), Weilin Liu(刘伟林), Zhenjia Zhou(周振佳), Jun Li(李骏), Guowen Yuan(袁国文)†, and Libo Gao(高力波)‡

National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory for Nanotechnology, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China

收稿日期:2024-10-26 修回日期:2025-01-03 接受日期:2025-02-07 出版日期:2025-04-15 发布日期:2025-04-15
通讯作者: Guowen Yuan, Libo Gao E-mail:gwyuan@nju.edu.cn;lbgao@nju.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 52425203 and 12104218), the the Natural Science Foundation of Jiangsu Province (Grant Nos. BK20240008 and BK20241252), the China National Postdoctoral Program for Innovative Talents (Grant No. BX2021120), the Xiaomi Foundation, the Postdoctoral Fellowship Program of CPSF (Grant No. GZC20231093), and Jiangsu Funding Program for Excellent Postdoctoral Talent (Grant No. 2023ZB553).

Fabrication of two-dimensional van der Waals moiré superlattices

National Laboratory of Solid State Microstructures, Jiangsu Key Laboratory for Nanotechnology, School of Physics, Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China

Received:2024-10-26 Revised:2025-01-03 Accepted:2025-02-07 Online:2025-04-15 Published:2025-04-15
Contact: Guowen Yuan, Libo Gao E-mail:gwyuan@nju.edu.cn;lbgao@nju.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 52425203 and 12104218), the the Natural Science Foundation of Jiangsu Province (Grant Nos. BK20240008 and BK20241252), the China National Postdoctoral Program for Innovative Talents (Grant No. BX2021120), the Xiaomi Foundation, the Postdoctoral Fellowship Program of CPSF (Grant No. GZC20231093), and Jiangsu Funding Program for Excellent Postdoctoral Talent (Grant No. 2023ZB553).

摘要/Abstract

摘要： Two-dimensional (2D) van der Waals (vdW) moiré superlattices have attracted significant attention due to their novel physical properties and quantum phenomena. The realization of these fascinating properties, however heavily depends on the quality of the measured moiré superlattices, emphasizing the importance of advanced fabrication techniques. This review provides an in-depth discussion of the methods for fabricating moiré superlattices. It begins with a brief overview of the structure, properties, and potential applications of moiré superlattices, followed by a detailed examination of fabrication techniques, focuses on different kinds of transfer techniques and growth methods, particularly chemical vapor deposition (CVD) method. Finally, it addresses current challenges in fabricating high-quality moiré superlattices and discusses potential directions for future advancements in this field. This review will enhance the understanding of moiré superlattice fabrication and contributing to the continued development of 2D twistronics.

关键词: 2D materials, moiré superlattices, fabrication techniques, chemical vapor deposition (CVD)

Abstract: Two-dimensional (2D) van der Waals (vdW) moiré superlattices have attracted significant attention due to their novel physical properties and quantum phenomena. The realization of these fascinating properties, however heavily depends on the quality of the measured moiré superlattices, emphasizing the importance of advanced fabrication techniques. This review provides an in-depth discussion of the methods for fabricating moiré superlattices. It begins with a brief overview of the structure, properties, and potential applications of moiré superlattices, followed by a detailed examination of fabrication techniques, focuses on different kinds of transfer techniques and growth methods, particularly chemical vapor deposition (CVD) method. Finally, it addresses current challenges in fabricating high-quality moiré superlattices and discusses potential directions for future advancements in this field. This review will enhance the understanding of moiré superlattice fabrication and contributing to the continued development of 2D twistronics.

Key words: 2D materials, moiré superlattices, fabrication techniques, chemical vapor deposition (CVD)

中图分类号: (Other semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions)

73.40.Lq

81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)) 82.45.Mp (Thin layers, films, monolayers, membranes)

Zihao Wan(万子豪), Chao Wang(王超), Hang Zheng(郑航), Wenna Tang(唐文娜), Zihao Fu(付梓豪), Weilin Liu(刘伟林), Zhenjia Zhou(周振佳), Jun Li(李骏), Guowen Yuan(袁国文), and Libo Gao(高力波). Fabrication of two-dimensional van der Waals moiré superlattices[J]. 中国物理B, 2025, 34(4): 47302-047302.

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Fabrication of two-dimensional van der Waals moiré superlattices

Fabrication of two-dimensional van der Waals moiré superlattices

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